中国激光, 2013, 40 (1): 0116001, 网络出版: 2013-01-05
同轴两反光学系统杂散光分析及内遮光罩优化设计
Stray Light Analysis of a Coaxial Two Reflect Mirror System and Optimized Design of Inner Photomask
补充材料
林剑春, 孙丽崴, 陈博洋, 王威, 范冰清, 陈凡胜. 同轴两反光学系统杂散光分析及内遮光罩优化设计[J]. 中国激光, 2013, 40(1): 0116001. Lin Jianchun, Sun Liwei, Chen Boyang, Wang Wei, Fan Bingqing, Chen Fansheng. Stray Light Analysis of a Coaxial Two Reflect Mirror System and Optimized Design of Inner Photomask[J]. Chinese Journal of Lasers, 2013, 40(1): 0116001.