部分相干分数域滤波改善光刻分辨率新方法
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杜惊雷, 张怡霄, 杨静, 刘世杰, 肖啸, 郭永康, 杜春雷. 部分相干分数域滤波改善光刻分辨率新方法[J]. 光子学报, 2003, 32(7): 892. 杜惊雷, 张怡霄, 杨静, 刘世杰, 肖啸, 郭永康, 杜春雷. New Filtering Approach on Partial Coherent Imaging System for Improving Photolithography Resolution[J]. ACTA PHOTONICA SINICA, 2003, 32(7): 892.