中国激光, 2015, 42 (3): 0303012, 网络出版: 2015-02-03
光波导端面的准分子激光刻蚀技术研究 下载: 564次
Research on Excimer Laser Etching Technology for Achieving Optical Waveguide End Face
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贾娜娜, 邓传鲁, 庞拂飞, 顾鑫, 王廷云. 光波导端面的准分子激光刻蚀技术研究[J]. 中国激光, 2015, 42(3): 0303012. Jia Nana, Deng Chuanlu, Pang Fufei, Gu Xin, Wang Tingyun. Research on Excimer Laser Etching Technology for Achieving Optical Waveguide End Face[J]. Chinese Journal of Lasers, 2015, 42(3): 0303012.