光学学报, 2015, 35 (10): 1011003, 网络出版: 2015-10-08
同轴两反式高NA投影光刻物镜热像差补偿方法研究
Compensation Method of Thermal Aberration for On-Axis Two-Mirror High NA lithographic Lens
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徐象如, 黄玮, 贾树强, 徐明飞. 同轴两反式高NA投影光刻物镜热像差补偿方法研究[J]. 光学学报, 2015, 35(10): 1011003. Xu Xiangru, Huang Wei, Jia Shuqiang, Xu Mingfei. Compensation Method of Thermal Aberration for On-Axis Two-Mirror High NA lithographic Lens[J]. Acta Optica Sinica, 2015, 35(10): 1011003.