红外与激光工程, 2018, 47 (6): 0621002, 网络出版: 2018-09-08
热处理对双离子束溅射SiO2薄膜力学及热力学特性的影响
Influence of thermal annealing on mechanical and thermoelastic characteristics of SiO2 films produced by DIBS
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冷健, 季一勤, 刘华松, 庄克文, 刘丹丹. 热处理对双离子束溅射SiO2薄膜力学及热力学特性的影响[J]. 红外与激光工程, 2018, 47(6): 0621002. Leng Jian, Ji Yiqin, Liu Huasong, Zhuang Kewen, Liu Dandan. Influence of thermal annealing on mechanical and thermoelastic characteristics of SiO2 films produced by DIBS[J]. Infrared and Laser Engineering, 2018, 47(6): 0621002.