光学学报, 2010, 30 (9): 2590, 网络出版: 2014-05-15   

子波面扫描法长焦距透镜波面检测系统研究

Study on a Wavefront Detection System for LongFocus Lens by SubWavefront Scanning
李遥 1,2,*白剑 1,2邓燕 1,2许乔 1,2杨国光 1,2
作者单位
1 浙江大学现代光学仪器国家重点实验室, 浙江 杭州 310027
2 精密光学工程研究中心, 四川 成都 610041
摘要
大口径长焦距透镜的波面检测目前仍没有一种行之有效的方法。为解决此问题,结合塔尔博特效应、叠栅条纹检测等现有技术手段,提出一种通过子孔径波面二维扫描对长焦距大口径透镜进行波面检测的新方案,并改进传统测量光路,兼顾测量精度和工程化,完成测量样机的研制。该方案通过子孔径波面二维扫描的方法获取子波面斜率,再通过以泽尼克多项式为基底模型、奇异值分解的模式法重构波面。经与WYKO激光干涉仪测量结果比较验证,测量方案正确可靠,测量样机能够应用在实际测量中。
Abstract
Until now, no effective solution is proposed to detect the wavefront of a longfocus and largediameter lens. To solve the problem, combining Talbot effect and Moiré fringe, a new method, which utilizes twodimensional scanning to detect the subaper ture wavefront, is proposed. The optical path is improved and a prototype is established after considering both precision and complexity of engineering. In this method, the subwavefront slope is obtained by twodimensional scanning. The wavefront is reconstructed by mode method based on Zernike polynomials and singular value decomposition method. Compared the experimental results with the measurements of WYKO laser interferometer, the method is validated and the precision of the prototype is acceptable in practical applications.
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李遥, 白剑, 邓燕, 许乔, 杨国光. 子波面扫描法长焦距透镜波面检测系统研究[J]. 光学学报, 2010, 30(9): 2590. Li Yao, Bai Jian, Deng Yan, Xu Qiao, Yang Guoguang. Study on a Wavefront Detection System for LongFocus Lens by SubWavefront Scanning[J]. Acta Optica Sinica, 2010, 30(9): 2590.

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