硅基光子晶体板的光刻和反应离子刻蚀
张磊, 张晓玉, 张福甲, 姚汉民, 杜春雷, 刘强, 潘莉. 硅基光子晶体板的光刻和反应离子刻蚀[J]. 光电工程, 2004, 31(2): 1.
张磊, 张晓玉, 张福甲, 姚汉民, 杜春雷, 刘强, 潘莉. Lithography and Reactive Ion Etching of Silicon-Based Photon Crystal Slab[J]. Opto-Electronic Engineering, 2004, 31(2): 1.
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张磊, 张晓玉, 张福甲, 姚汉民, 杜春雷, 刘强, 潘莉. 硅基光子晶体板的光刻和反应离子刻蚀[J]. 光电工程, 2004, 31(2): 1. 张磊, 张晓玉, 张福甲, 姚汉民, 杜春雷, 刘强, 潘莉. Lithography and Reactive Ion Etching of Silicon-Based Photon Crystal Slab[J]. Opto-Electronic Engineering, 2004, 31(2): 1.
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