1 Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow 119991, Russia
2 Bauman Moscow State Technical University, Moscow 105005, Russia
3 Institute for Regenerative Medicine, Sechenov University, Moscow 119991, Russia
4 Institute of Solid State Physics of the Russian Academy of Sciences, Chernogolovka 142432, Russia
5 Research Institute of Human Morphology, Moscow 117418, Russia
6 School of Precision Instrument and Optoelectronic Engineering, Tianjin University, Tianjin 300000, China
7 College of Materials Science and Engineering, Sichuan University, Chengdu 610000, China
8 Science Medical Center, Saratov State University, Saratov 410012, Russia
9 Institute of Precision Mechanics and Control, FRC "Saratov Scientific Centre of the Russian Academy of Sciences", Saratov 410028, Russia