A dual-frequency digital Moiré measurement method (DFDM) is proposed for the three-dimensional (3D) shape measurement of an object. The high- and low-frequency fringes are modulated separately along orthogonal direction using different carrier frequencies before being projected onto the measured object. After collecting and demodulating the composite fringe, the digital π phase shift is used to remove the DC component of the demodulated fringes, resulting in high-precision Moiré fringes for calculating the wrapped phase. The unwrapping of the high-frequency wrapped phase is guided by the low-frequency phase to further realistically reconstruct the surface of the measured object. When compared with existing single-shot digital Moiré profilometry, DFDM effectively removes the DC component of the fringe and calculates the phase more accurately.A dual-frequency digital Moiré measurement method (DFDM) is proposed for the three-dimensional (3D) shape measurement of an object. The high- and low-frequency fringes are modulated separately along orthogonal direction using different carrier frequencies before being projected onto the measured object. After collecting and demodulating the composite fringe, the digital π phase shift is used to remove the DC component of the demodulated fringes, resulting in high-precision Moiré fringes for calculating the wrapped phase. The unwrapping of the high-frequency wrapped phase is guided by the low-frequency phase to further realistically reconstruct the surface of the measured object. When compared with existing single-shot digital Moiré profilometry, DFDM effectively removes the DC component of the fringe and calculates the phase more accurately.

为了实现非球面面形误差的高精度测量, 研究了基于部分补偿原理的数字莫尔移相干涉技术中回程误差的消除方法。通过建立实际干涉仪和建模理想干涉仪, 并运用数字莫尔移相干涉技术, 获得实际干涉仪像面与被测非球面面形误差相关的波前; 分析了该测量系统的误差, 提出采用逆向优化法消除大面形误差时的回程误差实现被测非球面的面形误差检测。实验结果表明: 与轮廓仪结果比对, 面形误差较小时二分之一法重构面形误差, 峰谷值和均方根值分别优于λ/20, 面形误差较大时运用逆向优化法消除回程误差, 重构的非球面面形误差峰谷值和均方根值偏差均优于λ/5。基于逆向优化法的部分补偿数字莫尔移相干涉非球面检测, 有效消除了大面形误差时的回程误差, 可实现高精度的面形误差重构检测。

基于数字叠栅移相干涉原理，分析了CCD像元尺寸、随机噪声和量化误差对采样后干涉条纹和合成叠栅条纹对比度的影响，并就干涉条纹频率对叠栅移相干涉相位测量精度的影响进行了理论分析和仿真研究。结果表明，随着干涉条纹空间频率的增大，CCD的采样过程、随机噪声和量化噪声会影响叠栅条纹信号的对比度和信噪比，并通过相位解算过程直接影响数字叠栅移相干涉的相位测量精度。以相位测量精度为π/50(折合光程差精度为λ/100）作为判断标准，对应可探测干涉条纹的最大空间频率为0.45 λ/pixel，为后续数字叠栅移相干涉测量范围的研究提供了定量理论依据。

数字莫尔条纹滤波处理是利用莫尔条纹进行非球面检测的关键技术之一，滤波结果直接影响非球面检测的精度，分别从空域和频域两个角度对滤波算法进行了讨论分析，并进行了模拟实验。结果表明，经两种方法处理后恢复的波面得到了较好的结果，全孔径相位分布残差的均方根（RMS）值分别为0.024λ和0.035λ，证明了滤波方法是可行的。

在扫描探针纳米加工技术的基础上，提出了利用原子力显微镜(AFM)来制作高频光栅的新工艺。利用AFM硅制探针，在接触模式下对光盘(聚碳酸酯材料)进行刻划试验。对刻划光栅的工艺参数进行优化，得到了纳米量级光栅。并将刻划所得光栅应用于数字云纹法，与数字参考栅干涉形成微／纳米数字云纹。实验结果表明，该法所制得的光栅可以应用于实际变形的测量。

提出一种新型的用于数字莫尔干涉术的快速数字莫尔合成算法——莫尔滤波合成法，使原始条纹图叠加形成的莫尔条纹图最大比例地携带了人们所感兴趣的信息。通过简单的数字图像处理就可提取出有用的空间频率信息，得到理想的莫尔条纹，减少了有用信息的损失。可应用于直接与复杂标准波面比较的场合，如非球面面形检测，轮廓测量等。