Micro-deposition of an aluminum film of 500-nm thickness on a quartz substrate was demonstrated by laser-induced forward transfer (LIFT) using a femtosecond laser pulse. With the help of atomic force microscopy (AFM) and scanning electron microscopy (SEM), the dependence of the morphology of deposited aluminum film on the irradiated laser pulse energy was investigated. As the laser fluence was slightly above the threshold fluence, the higher pressure of plasma for the thicker film made the free surface of solid phase burst out, which resulted in that not only the solid material was sputtered but also the deposited film in the liquid state was made irregularly.

为了直接制备出壁厚均匀的精细薄壁零件，试验研究了激光微沉积StelliteF合金粉末的工艺参数对壁厚均匀性及沉积过程稳定性的影响。通过对激光微沉积薄壁的截面组织及形貌的分析表明，沉积过程的热散失条件影响壁厚的均匀性；选择合适选择合适的工艺参数，可沉积出表面粗糙度Ra低于10μm、内部组织致密、厚度均匀(壁厚约0．4mm)的薄壁零件。结果表明，激光微沉积合金粉末技术在细小零件的激光表面改性及高精度小型零件的直接制备方面具有很好的应用开发前景。