Author Affiliations
Abstract
1 School of Science, Civil Aviation University of China, Tianjin 300300
2 Ultrafast Laser Laboratory, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072
3 Key Laboratory of Optoelectronic Information Technical Science, Ministry of Education of China, Tianjin 300072
Micro-deposition of an aluminum film of 500-nm thickness on a quartz substrate was demonstrated by laser-induced forward transfer (LIFT) using a femtosecond laser pulse. With the help of atomic force microscopy (AFM) and scanning electron microscopy (SEM), the dependence of the morphology of deposited aluminum film on the irradiated laser pulse energy was investigated. As the laser fluence was slightly above the threshold fluence, the higher pressure of plasma for the thicker film made the free surface of solid phase burst out, which resulted in that not only the solid material was sputtered but also the deposited film in the liquid state was made irregularly.
飞秒激光 激光诱导向前转移技术 薄膜 微沉积 140.7090 Ultrafast lasers 220.4000 Microstructure fabrication 160.3900 Metals Chinese Optics Letters
2007, 5(5): 308