双Bowtie纳米光刻结构的聚焦特性研究
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郑杰, 刘贤超, 黄跃容, 刘昀玥, 陈卫东, 李玲. 双Bowtie纳米光刻结构的聚焦特性研究[J]. 光电工程, 2017, 44(2): 216. Jie Zheng, Xianchao Liu, Yuerong Huang, Yunyue Liu, Weidong Chen, Ling Li. The investigation of focusing characteristic based on double Bowtie nano-lithography structure[J]. Opto-Electronic Engineering, 2017, 44(2): 216.
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