基于多层膜光栅的AFM探针结构表征研究
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吴子若, 蔡燕妮, 王星睿, 张龙飞, 邓晓, 程鑫彬, 李同保. 基于多层膜光栅的AFM探针结构表征研究[J]. 红外与激光工程, 2020, 49(2): 0213001. Wu Ziruo, Cai Yanni, Wang Xingrui, Zhang Longfei, Deng Xiao, Cheng Xinbin, Li Tongbao. Investigation of AFM tip characterization based on multilayer gratings[J]. Infrared and Laser Engineering, 2020, 49(2): 0213001.