柔性压力传感器成型技术及制备工艺研究进展
[1] LI R, ZHOU Q, BI Y, et al. Research progress of flexible capacitive pressure sensor for sensitivity enhancement approaches[J]. Sensors and Actuators A: Physical, 2021, 321: 112425.
[2] RUTH S R A,FEIG V R,TRAN H,et al. Microengineering pressure sensor active layers for improved performance [J]. Advanced Functional Materials, 2020, 30(39): 2003491.
[3] JIAN M,XIA K,WANG Q,et al. Flexible and highly sensitive pressure sensors based on bionic hierarchical structures [J]. Advanced Functional Materials,2017,27(9): 1606066.
[4] WEI Y, CHEN S, LIN Y, et al. Cu-Ag core-shell nanowires for electronic skin with a petal molded microstructure [J]. Journal of Materials Chemistry C, 2015, 3(37): 9594-9602.
[5] WAN Y, QIU Z, HONG Y, et al. A highly sensitive flexible capacitive tactile sensor with sparse and high‐aspect‐ratio microstructures [J]. Advanced Electronic Materials, 2018, 4(4): 1700586.
[6] QIU Z, WAN Y, ZHOU W, et al. Ionic skin with biomimetic dielectric layer templated from calathea zebrine leaf [J]. Advanced Functional Materials, 2018, 28(37): 1802343.
[7] WANG X,GU Y,XIONG Z,et al. Silk-molded flexible, ultrasensitive, and highly stable electronic skin for monitoring human physiological signals [J]. Advanced Materials, 2013, 26(9): 1336-1342.
[8] 李明星, 姚佳楠, 刘江, 等. 基于磨砂玻璃压印的压阻式柔性压力传感器 [J]. 固体电子学研究与进展, 2017,41(2): 154-159.
[9] PARK S J,KIM J,CHU M,et al. Flexible piezoresistive pressure sensor using wrinkled carbon nanotube thin films for human physiological signals [J]. Advanced Materials Technologies,2017,3(1): 1700158.
[10] BEAK S,JANG H,KIM S,et al. Flexible piezocapacitive sensors based on wrinkled microstructures:toward low-cost fabrication of pressure sensors over large areas [J]. RSC Advances,2012, 7(63): 39420-39426.
[11] SHAO Q, NIU Z, HIRTZ M, et al. High‐performance and tailorable pressure sensor based on ultrathin conductive polymer film [J]. Small, 2014, 10(8): 1466-1472.
[12] CHOONG C L,SHIM M B,LEE B S,et al. Highly stretchable resistive pressure sensors using a conductive elastomeric composite on a micropyramid array [J]. Advanced Materials,2014,26(21): 3451-3458.
[13] TEE B C K,CHORTOS A,DUNN R R, et al. Tunable flexible pressure sensors using microstructured elastomer geometries for intuitive electronics [J]. Advanced Functional Materials,2014,24(34): 5427-5434.
[14] KHALILI N,SHEN X,NAGUIB H E,et al. An interlocked flexible piezoresistive sensor with 3D micropyramidal structures for electronic skin applications [J]. Soft Matter,2018,14(33): 6912-6920.
[15] RUTH S R A, BEKER L, TRAN H, et al. Rational design of capacitive pressure sensors based on pyramidal microstructures for specialized monitoring of biosignals [J]. Advanced Functional Materials, 2020, 30(29): 1903100.
[16] PANG C,LEE G Y,KIM T,et al. A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres [J]. Nature Materials, 2012,11(9): 795-801.
[17] 赵秀华, 徐伟, 易旺民, 等. 基于Ag/CNTs-PDMS的高灵敏度柔性压力传感器研制及性能测试 [J]. 航天器环境工程, 2019, 36(3): 271-277.
[18] ZHANG Y,HU Y,ZHAO T,et al. Highly sensitive flexible pressure sensor based on microstructured PDMS for wearable electronics application [J]. 18 th International Conference on Microstructured PDMS for Wearable Electronics Application (ICEPT). 2017:853-856.
[19] CHENG W,WANG J,MA Z,et al. Flexible pressure sensor with high sensitivity and low hysteresis based on a hierarchically microstructured electrode [J]. IEEE Electron Device Letter,2018,39(2): 288-291.
[20] LEE Y, PARK J, CHO S, et al. Flexible ferroelectric sensors with ultrahigh pressure sensitivity and linear response over exceptionally broad pressure range [J]. ACS Nano, 2018, 12(4): 4045-4054.
[21] WANG X, GU Y, XIONG Z, et al. Silk-molded flexible, ultrasensitive, and highly stable electronic skin for monitoring human physiological signals [J]. Advanced Materials, 2014, 26(9): 1336-1342.
[22] RYU S, LEE P, CHOU J B, et al. Extremely elastic wearable carbon nanotube fiber strain sensor for monitoring of human motion [J]. ACS Nano, 2015, 9(6): 5929-5936.
[23] LIU H, HUANG W J, YANG X R, et al. Organic vapor sensing behaviors of conductive thermoplastic polyurethane - graphene nanocomposites [J]. Journal of Materials Chemistry C, 2016, 4(20): 4459-4469.
[24] LI X, HUANG W, YAO G, et al. Highly sensitive flexible tactile sensors based on microstructured multiwall carbon nanotube arrays [J]. Scripta Materialia, 2017, 129: 61-64.
[25] ZHU B,NIU Z Q,WANG H,et al. Microstructured graphene arrays for highly sensitive flexible tactile sensors [J]. Small, 2014, 10(18): 3625-3631.
[26] PARK J, LEE Y, HONG J, et al. Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins [J]. ACS Nano, 2014, 8(5): 4689-4697.
[27] MANNSFELD S C B, TEE B C K, STOLTENBERG R M, et al. Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers [J]. Nature Materials, 2010, 9(10): 859-864.
[28] PENG S, BLANLOEUIL P, WU S, et al. Rational design of ultrasensitive pressure sensors by tailoring microscopic features [J]. Advanced Materials Interfaces, 2018, 5(18): 1800403.
[29] SHI J, WANG L, DAI Z, et al. Multiscale hierarchical design of a flexible piezoresistive pressure sensor with high sensitivity and wide linearity range [J]. Small,2018, 14(27): 1800819.
[30] XU M, LI F, ZHANG Z, et al. Piezoresistive sensors based on rGO 3D microarchitecture: coupled properties tuning in local/integral deformation [J]. Advanced Electronic Materials, 2019, 5(1): 1800461.
[31] YAO H B, HUANG G, CUI C H, et al. Macroscale elastomeric conductors generated from hydrothermally synthesized metal-polymer hybrid nanocable sponges [J]. Advanced Materials, 2011, 23(32): 3643-3647.
[32] JI B, ZHOU Q, WU J, et al. Synergistic optimization toward the sensitivity and linearity of flexible pressure sensor via double conductive layer and porous microdome array [J]. ACS Applied Materials & Interfaces, 2020, 12(27): 31021-31035.
[33] 李云霞. 基于三维多孔结构的柔性电阻式压力传感器研究 [D]. 兰州: 兰州大学, 2022.
[34] WANG L, LOU Z, JIANG K, et al. Bio‐multifunctional smart wearable sensors for medical devices [J]. Advanced Intelligent Systems, 2019, 1(5): 1900040.
[35] HE J, ZHANG Y, ZHOU R, et al. Recent advances of wearable and flexible piezoresistivity pressure sensor devices and its future prospects [J]. Journal of Materiomics, 2020, 6(1): 86-101.
吴旭鹏, 方玉明, 费宏欣, 蔡滕, 赵江, 李若舟. 柔性压力传感器成型技术及制备工艺研究进展[J]. 微电子学, 2023, 53(2): 295. WU Xupeng, FANG Yuming, FEI Hongxin, CAI Teng, ZHAO Jiang, LI Ruozhou. Research Progress of Flexible Pressure Sensor’s Molding Technologies and Preparation Processes[J]. Microelectronics, 2023, 53(2): 295.