飞秒激光辅助化学刻蚀加工技术在高质量、高深径比、高可控性的微孔加工方面独具优势，为微孔的制备提供了新的途径和方法。在微全分析系统、光纤中的三维光流控系统、谐振器制造中具有很大的应用潜力。本文综述了近年来飞秒激光辅助化学刻蚀加工透明介质材料的研究进展，包括飞秒激光改性区对刻蚀速率影响、强酸强碱化学溶液对刻蚀效果的影响、化学刻蚀步骤工艺的优化、飞秒激光辅助化学刻蚀加工方法的应用等，总结了飞秒激光辅助化学刻蚀微通道、结构加工机理以及工艺等方面面临的挑战，并对今后的研究重点进行了展望。

Femtosecond laser-assisted chemical etching technology has unique advantages in high quality, high depth to diameter ratio and high controllability of microporous processing, which provides a new way and method for the preparation of microporous. It has great application potential in micro total analysis system, three-dimensional optical flow control system in optical fiber and resonator manufacturing. In this paper, the research progress of femtosecond laser-assisted chemical etching for transparent media materials in recent years is reviewed, including the effect of femtosecond laser-modified zone on etching rate, the effect of strong acid and strong alkali chemical solution on etching effect, the optimization of chemical etching process, and the application of femtosecond laser-assisted chemical etching. The challenges faced by femtosecond laser-assisted chemical etching of microchannels, structure processing mechanism, and technology are summarized, and the research focus in the future is prospected.