准分子激光脉冲直写刻蚀速率与能量密度的关系
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魏仁选, 姜德生, 周祖德. 准分子激光脉冲直写刻蚀速率与能量密度的关系[J]. 光学 精密工程, 2004, 12(2): 231. 魏仁选, 姜德生, 周祖德. [J]. Optics and Precision Engineering, 2004, 12(2): 231.
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