压电与声光, 2022, 44 (2): 268, 网络出版: 2022-06-14  

方体压电谐振器共振频率电调谐技术

Resonance Frequency Electrical Tuning Technology of Cuboid Piezoelectric Resonator
作者单位
上海交通大学 电子信息与电气工程学院 微纳电子学系 微纳米加工技术国家级重点实验室,上海 200240
摘要
受环境因素的影响,压电谐振器的共振频率会发生漂移。调谐技术因采用特定的手段主动调节共振频率而得到广泛应用,但传统附加质量块、激光烧蚀等机械调谐技术费时费力,灵活性不好。针对方体压电谐振器该文提出了一种激励信号幅值调谐和直流调谐的电调谐方法,可精密调节谐振器的共振频率。设计了一种基于ZYNQ系列主控芯片的数字化测控电路,实现了振子扫频激励、输出信号的幅值相位检测,为激励信号幅值调谐和直流调谐提供了实验硬件平台。实验结果表明,激励信号幅值调谐的共振频率变化范围为347, 850~348, 000 kHz,直流调谐的调节范围为347, 720~347, 820 kHz。该技术为压电谐振器共振频率精密调节提供可靠的理论与实践途径。
Abstract
The resonance frequency of the piezoelectric resonator will drift due to environmental factors, The tuning technology actively adjusts the resonance frequency by using specific means, which has a wide range of applications, Traditional mechanical tuning techniques such as additional masses attachment and laser ablation are time-consuming and labor-intensive, and have poor flexibility, For the cuboid piezoelectric resonator, an electrical tuning method of excitation signal amplitude tuning and DC tuning is proposed, This method can precisely adjust the resonance frequency of the resonator, A digital measurement and control circuit based on ZYNQ is designed, which realizes the frequency sweep excitation of the vibrator, The circuit also detects the amplitude and phase of the output signal, providing an experimental hardware platform for the excitation signal amplitude tuning and DC tuning, The experimental results show that the resonance frequency adjustment range of excitation signal amplitude tuning is about 347, 850~348, 000 kHz, and the adjustment range of DC tuning is about 347, 720~347, 820 kHz, This technology provides a reliable theoretical and practical approach for the precise adjustment of the resonance frequency of piezoelectric resonators,
参考文献

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赵俊军, 吴校生, 冯其云, 李健, 孙仁杰. 方体压电谐振器共振频率电调谐技术[J]. 压电与声光, 2022, 44(2): 268. ZHAO Junjun, WU Xiaosheng, FENG Qiyun, LI Jian, SUN Renjie. Resonance Frequency Electrical Tuning Technology of Cuboid Piezoelectric Resonator[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 268.

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