为了实时监测石化反应器内部高温、高压环境下压力和温度变化, 严格控制原料的反应过程, 采用法布里-珀罗(F-P)多腔干涉理论, 设计并制备了一种光纤F-P温度、压力复合传感器。该传感器由石英玻璃和蓝宝石玻璃构成, 石英与蓝宝石之间的空气腔为压力腔, 温度腔则为蓝宝石本身。通过理论计算和仿真验证, 分析了压力腔和温度腔不同参数对传感器性能的影响, 从而取得了最佳的传感器结构参数数据。结果表明,该传感器制作工艺简单且性能可靠, 能够实现0MPa~5MPa和-20℃~300℃范围内压力和温度的同时测量; 该传感器在压力0.1MPa~5MPa和温度20℃~180℃环境下有良好压力温度线性响应关系, 压力灵敏度为796nm/MPa, 温度灵敏度为3.864nm/℃。该传感器适用于石化反应器内部高温高压环境下压力和温度的同时监测。

In order to monitor the pressure and temperature changes in petrochemical reactor under high temperature and high pressure in real time and strictly control the reaction process of raw materials, an optical fiber Fabry-Perot (F-P) temperature and pressure composite sensor was designed and fabricated by using F-P multi cavity interference theory. The sensor was composed of quartz glass and sapphire glass. The air chamber between quartz and sapphire was pressure chamber, and the temperature chamber was sapphire itself. Through theoretical calculation and simulation verification, the effects of different parameters of pressure chamber and temperature chamber on the performance of the sensor were analyzed, and the best structural parameter data of the sensor were obtained. The results show that the sensor has simple fabrication process and reliable performance, and can realize the simultaneous measurement of pressure and temperature in the range of 0MPa~5MPa and -20℃~300℃. The experimental results show that the sensor has a good linear response relationship between pressure and temperature under the environment of pressure 0.1MPa~5MPa and temperature 20℃~180℃. The pressure sensitivity is 796nm/MPa and the temperature sensitivity is 3.864nm/℃. The sensor is suitable for simultaneous monitoring of pressure and temperature in high temperature and high pressure environment in petrochemical reactor.