AlN/PZT复合压电薄膜层SAW激励与传播研究
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文芷菁, 张涛, 柯贤桐, 刘鑫鑫, 曹晓闯, ALIREZA Baghai Wadji. AlN/PZT复合压电薄膜层SAW激励与传播研究[J]. 压电与声光, 2022, 44(2): 205. WEN Zhijing, ZHANG Tao, KE Xiantong, LIU Xinxin, CAO Xiaochuang, ALIREZA Baghai Wadji. Research on Excitation and Propagation of Surface Acoustic Wave in AlN/PZT Composite Piezoelectric Film[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 205.
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