压电与声光, 2022, 44 (4): 565, 网络出版: 2022-10-29
片式多层陶瓷电容器陶瓷晶粒酸腐蚀应用研究
Study on Acid Corrosion of Ceramic Grain of Multi-Layer Ceramic Capacitors
摘要
以混合酸作为腐蚀液, 腐蚀陶瓷介质层晶粒晶界, 再使用扫描电子显微镜进行微观结构观察。试验结果表明, 腐蚀液的种类、浓度、腐蚀时间及温度均对腐蚀效果影响较大。最终确定适宜的腐蚀条件为: 氢氟酸-硝酸体系,氢氟酸2 mL,硝酸5 mL,配置成100 mL溶液, Class 2(BaTiO3)陶瓷室温下腐蚀时间50 s, Class 1((Sr,Ca)(Zr,Ti)O3)陶瓷腐蚀15 s。
Abstract
Using mixed acid as corrosive liquid to corrode the grain boundaries of ceramic dielectric layer with SEM to observe microstructure, The test results show that the type and concentration of corrosion solution, corrosion time and temperature have significant effects on the corrosion effect. And the most suitable corrosion conditions were: hydrofluoric acid-nitric acid system, configure 2 mL of hydrofluoric acid and 5 mL of nitric acid into a 100 mL solution; the corrosion period of Class2(BaTiO3) ceramics under room temp. of 25 ℃ was 50 s, while Class 1((Sr,Ca)(Zr,Ti)O3) was 15 s.
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李冬梅, 江孟达, 向勇, 韦小晴, 吴炜坚. 片式多层陶瓷电容器陶瓷晶粒酸腐蚀应用研究[J]. 压电与声光, 2022, 44(4): 565. LI Dongmei, JIANG Mengda, XIANG Yong, WEI Xiaoqing, WU Weijian. Study on Acid Corrosion of Ceramic Grain of Multi-Layer Ceramic Capacitors[J]. Piezoelectrics & Acoustooptics, 2022, 44(4): 565.
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