激光薄膜吸收损耗控制研究进展

温家慧; 朱美萍; 孙建; 李静平; 邵建达

doi:doi:10.3788/AOS202242.0700001

光学学报, 2022, 42 (7): 0700001, 网络出版: 2022-03-28

激光薄膜吸收损耗控制研究进展下载： 1368次封面文章

Research Progress on Absorption Loss Control of Laser Coating

温家慧 ^1,2朱美萍 ^1,2,3,*孙建 ¹李静平 ¹邵建达 ^1,2,3

作者单位

¹ 中国科学院上海光学精密机械研究所薄膜光学实验室, 上海201800

² 中国科学院大学材料科学与光电技术学院, 北京100049

³ 国科大杭州高等研究院, 浙江杭州310024

图 & 表

图 1. 共蒸发沉积技术示意图

Fig. 1. Schematic diagram of co-evaporation deposition technology

下载图片查看原文

图 2. 根据沉积方法分组的竞赛样品的抗激光损伤性能^[30]

Fig. 2. Laser damage resistance of competition samples grouped by deposition method^[30]

下载图片查看原文

图 3. 离子束共溅射沉积示意图

Fig. 3. Schematic diagram of Co-IBS

下载图片查看原文

图 4. 薄膜材料的吸收。(a) SiO₂全谱段吸收示意图^[3];(b)不同波段的光吸收机理

Fig. 4. Absorption of coating materials. (a) Schematic diagram of SiO₂ full spectrum absorption^[3]; (b) light absorption mechanism for different bands

下载图片查看原文

图 5. 吸收测量技术。双通道光腔衰荡法的(a)实验装置示意图和(b)测量结果^[42];(c) PCI实验装置示意图^[45]

Fig. 5. Absorption measurement technology. (a) Schematic diagram of experimental setup and (b) measurement results of two-channel optical cavity ring-down technique^[42]; (c) schematic diagram of PCI experimental setup^[45]

下载图片查看原文

图 6. 石英玻璃的缺陷中心及其吸收中心波长^[48]

Fig. 6. Defect centers and center wavelengths of absorption of fused silica^[48]

下载图片查看原文

图 7. 含氧空位的氧化铪能带结构及其总态密度^[56]。(a)(b)计算的氧化铪与V_O-III和V_O-IV的能带结构(虚线显示价带边缘设置为零能级);(c)纯氧化铪以及含有三配位氧空位和四配位氧空位的氧化铪总态密度图

Fig. 7. Calculated band structures and total density of hafnium oxide with oxygen vacancy^[56]. (a)(b) Calculated band structures of hafnium oxide with V_O-III and V_O-IV (valence band edge is set at zero energy level, as displayed by dash lines); (c) total density of state (TDOS) of pure hafnium oxide and hafnium oxide with V_O-III and V_O-IV

下载图片查看原文

图 8. 多材料组合薄膜^[68]。(a)薄膜结构示意图;(b)三种薄膜的光谱图

Fig. 8. Multimaterial combination coating^[68]. (a) Schematic of multimaterial coating; (b) spectra of three coatings

下载图片查看原文

图 9. 高反(HR)膜膜系结构示意图^[69]。(a)典型的引力波探测器高反膜膜系结构;(b) 4种材料组成的组合薄膜

Fig. 9. Schematic diagrams of HR coating stack^[69]. (a) Schematic of typical high-reflection coating stack of gravitational wave detector; (b) schematic of four-material coating

下载图片查看原文

图 10. 120 mm直径的Ti掺杂Ta₂O₅薄膜样品的吸收测量图^[47]

Fig. 10. Map of absorption of Ti doped Ta₂O₅ coating measured over 120 mm diameter^[47]

下载图片查看原文

表 1电子束蒸发沉积的SiO₂薄膜吸收特性^[44]

Table1. Absorption characteristics of SiO₂ coating deposited by electron-beam evaporation^[44]

Band	Absorption type (center wavelength of absorption)	Characteristic	Approach
UV and visible bands	Oxygen defect	Main absorption source
Infrared band	Water absorption (2.95 μm)	Magnitude of k is 10^-2	Thermal annealing
	Hydroxyl defect (2.73 μm)	Magnitude of k is 10^-3

查看原文

表 2部分薄膜材料的小消光系数及其对应的镀膜方式

Table2. Low extinction coefficients of some materials and corresponding coating method

Material	Deposition process	Wavelength /nm	Extinction coefficient
	E-Beam^[86]	355	1×10^-8
SiO₂	IBS^[7]	1064	4×10^-7
	PIAD E-Beam^[46]	1064	1.27×10^-6
HfO₂	E-Beam ^[86]	355	2.8×10^-4
	E-Beam^[44]	1064	9.3×10^-7
Nb₂O₅	PIAD E-Beam^[46]	1064	6.05×10^-6
Al₂O₃	IBS^[31]	635	5×10^-6
Ta₂O₅	IBS^[7]	1064	4.5×10^-7
a-Si	IBS^[37]	1550	1.2×10^-5
TiO₂	IAD E-Beam^[46]	-	10^-5
Ta₂O₅-TiO₂	IBS^[47]	1064, 1550	10^-7--10^-6
Ta₂O₅-Nb₂O₅	Co-IBS^[87]	1550	2.35×10^-4
Si₃N₄	LPCVD^[69]	1550	10^-5
ZnSe	Resistive heating ^[35]	1064	2.15×10^-5
YbF₃	Resistive heating^[35]	1064	8.1×10^-6

查看原文

温家慧, 朱美萍, 孙建, 李静平, 邵建达. 激光薄膜吸收损耗控制研究进展[J]. 光学学报, 2022, 42(7): 0700001. Jiahui Wen, Meiping Zhu, Jian Sun, Jingping Li, Jianda Shao. Research Progress on Absorption Loss Control of Laser Coating[J]. Acta Optica Sinica, 2022, 42(7): 0700001.

激光薄膜吸收损耗控制研究进展下载： 1368次封面文章

图 1. 共蒸发沉积技术示意图

Fig. 1. Schematic diagram of co-evaporation deposition technology

图 2. 根据沉积方法分组的竞赛样品的抗激光损伤性能^[30]

Fig. 2. Laser damage resistance of competition samples grouped by deposition method^[30]

图 3. 离子束共溅射沉积示意图

Fig. 3. Schematic diagram of Co-IBS

图 4. 薄膜材料的吸收。(a) SiO₂全谱段吸收示意图^[3];(b)不同波段的光吸收机理

Fig. 4. Absorption of coating materials. (a) Schematic diagram of SiO₂ full spectrum absorption^[3]; (b) light absorption mechanism for different bands

图 5. 吸收测量技术。双通道光腔衰荡法的(a)实验装置示意图和(b)测量结果^[42];(c) PCI实验装置示意图^[45]

Fig. 5. Absorption measurement technology. (a) Schematic diagram of experimental setup and (b) measurement results of two-channel optical cavity ring-down technique^[42]; (c) schematic diagram of PCI experimental setup^[45]

图 6. 石英玻璃的缺陷中心及其吸收中心波长^[48]

Fig. 6. Defect centers and center wavelengths of absorption of fused silica^[48]

图 7. 含氧空位的氧化铪能带结构及其总态密度^[56]。(a)(b)计算的氧化铪与V_O-III和V_O-IV的能带结构(虚线显示价带边缘设置为零能级);(c)纯氧化铪以及含有三配位氧空位和四配位氧空位的氧化铪总态密度图

图 8. 多材料组合薄膜^[68]。(a)薄膜结构示意图;(b)三种薄膜的光谱图

Fig. 8. Multimaterial combination coating^[68]. (a) Schematic of multimaterial coating; (b) spectra of three coatings

图 9. 高反(HR)膜膜系结构示意图^[69]。(a)典型的引力波探测器高反膜膜系结构;(b) 4种材料组成的组合薄膜

Fig. 9. Schematic diagrams of HR coating stack^[69]. (a) Schematic of typical high-reflection coating stack of gravitational wave detector; (b) schematic of four-material coating

图 10. 120 mm直径的Ti掺杂Ta₂O₅薄膜样品的吸收测量图^[47]

Fig. 10. Map of absorption of Ti doped Ta₂O₅ coating measured over 120 mm diameter^[47]

表 1电子束蒸发沉积的SiO₂薄膜吸收特性^[44]

Table1. Absorption characteristics of SiO₂ coating deposited by electron-beam evaporation^[44]

表 2部分薄膜材料的小消光系数及其对应的镀膜方式

Table2. Low extinction coefficients of some materials and corresponding coating method

关于本站 Cookie 的使用提示

全站搜索

激光薄膜吸收损耗控制研究进展 下载： 1368次封面文章

图 1. 共蒸发沉积技术示意图

Fig. 1. Schematic diagram of co-evaporation deposition technology

图 2. 根据沉积方法分组的竞赛样品的抗激光损伤性能[30]

Fig. 2. Laser damage resistance of competition samples grouped by deposition method[30]

图 3. 离子束共溅射沉积示意图

Fig. 3. Schematic diagram of Co-IBS

图 4. 薄膜材料的吸收。(a) SiO2全谱段吸收示意图[3];(b)不同波段的光吸收机理

Fig. 4. Absorption of coating materials. (a) Schematic diagram of SiO2 full spectrum absorption[3]; (b) light absorption mechanism for different bands

图 5. 吸收测量技术。双通道光腔衰荡法的(a)实验装置示意图和(b)测量结果[42];(c) PCI实验装置示意图[45]

Fig. 5. Absorption measurement technology. (a) Schematic diagram of experimental setup and (b) measurement results of two-channel optical cavity ring-down technique[42]; (c) schematic diagram of PCI experimental setup[45]

图 6. 石英玻璃的缺陷中心及其吸收中心波长[48]

Fig. 6. Defect centers and center wavelengths of absorption of fused silica[48]

图 7. 含氧空位的氧化铪能带结构及其总态密度[56]。(a)(b)计算的氧化铪与VO-III和VO-IV的能带结构(虚线显示价带边缘设置为零能级);(c)纯氧化铪以及含有三配位氧空位和四配位氧空位的氧化铪总态密度图

图 8. 多材料组合薄膜[68]。(a)薄膜结构示意图;(b)三种薄膜的光谱图

Fig. 8. Multimaterial combination coating[68]. (a) Schematic of multimaterial coating; (b) spectra of three coatings

图 9. 高反(HR)膜膜系结构示意图[69]。(a)典型的引力波探测器高反膜膜系结构;(b) 4种材料组成的组合薄膜

Fig. 9. Schematic diagrams of HR coating stack[69]. (a) Schematic of typical high-reflection coating stack of gravitational wave detector; (b) schematic of four-material coating

图 10. 120 mm直径的Ti掺杂Ta2O5薄膜样品的吸收测量图[47]

Fig. 10. Map of absorption of Ti doped Ta2O5 coating measured over 120 mm diameter[47]

表 1电子束蒸发沉积的SiO2薄膜吸收特性[44]

Table1. Absorption characteristics of SiO2 coating deposited by electron-beam evaporation[44]

表 2部分薄膜材料的小消光系数及其对应的镀膜方式

Table2. Low extinction coefficients of some materials and corresponding coating method

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索

激光薄膜吸收损耗控制研究进展下载： 1368次封面文章

图 2. 根据沉积方法分组的竞赛样品的抗激光损伤性能^[30]

Fig. 2. Laser damage resistance of competition samples grouped by deposition method^[30]

图 4. 薄膜材料的吸收。(a) SiO₂全谱段吸收示意图^[3];(b)不同波段的光吸收机理

Fig. 4. Absorption of coating materials. (a) Schematic diagram of SiO₂ full spectrum absorption^[3]; (b) light absorption mechanism for different bands

图 5. 吸收测量技术。双通道光腔衰荡法的(a)实验装置示意图和(b)测量结果^[42];(c) PCI实验装置示意图^[45]

Fig. 5. Absorption measurement technology. (a) Schematic diagram of experimental setup and (b) measurement results of two-channel optical cavity ring-down technique^[42]; (c) schematic diagram of PCI experimental setup^[45]

图 6. 石英玻璃的缺陷中心及其吸收中心波长^[48]

Fig. 6. Defect centers and center wavelengths of absorption of fused silica^[48]

图 7. 含氧空位的氧化铪能带结构及其总态密度^[56]。(a)(b)计算的氧化铪与V_O-III和V_O-IV的能带结构(虚线显示价带边缘设置为零能级);(c)纯氧化铪以及含有三配位氧空位和四配位氧空位的氧化铪总态密度图

图 8. 多材料组合薄膜^[68]。(a)薄膜结构示意图;(b)三种薄膜的光谱图

Fig. 8. Multimaterial combination coating^[68]. (a) Schematic of multimaterial coating; (b) spectra of three coatings

图 9. 高反(HR)膜膜系结构示意图^[69]。(a)典型的引力波探测器高反膜膜系结构;(b) 4种材料组成的组合薄膜

Fig. 9. Schematic diagrams of HR coating stack^[69]. (a) Schematic of typical high-reflection coating stack of gravitational wave detector; (b) schematic of four-material coating

图 10. 120 mm直径的Ti掺杂Ta₂O₅薄膜样品的吸收测量图^[47]

Fig. 10. Map of absorption of Ti doped Ta₂O₅ coating measured over 120 mm diameter^[47]

表 1电子束蒸发沉积的SiO₂薄膜吸收特性^[44]

Table1. Absorption characteristics of SiO₂ coating deposited by electron-beam evaporation^[44]