为了得到热电式MEMS微波功率传感器的三维温度分布和时间常数,建立了传感器的三维等效电路模型。首先根据热-电参数的等效关系和传感器的结构建立等效电路模型。接着,对等效电路的单元模块进行理论分析。最后,根据建立的三维等效电路模型研究传感器的温度分布和响应时间。传感器的灵敏度为0.076 mV/mW @10 GHz,时间常数为56.24 μs。测试结果表明,传感器的灵敏度为0.06 mV/mW @10 GHz,时间常数为85 μs。所建立的三维等效电路模型不但可以得到微波功率传感器的响应时间,而且可以准确地得到热量在衬底的耗散情况。因此,本研究对热电式MEMS微波功率传感器设计具有一定的参考价值。

In order to obtain 3-D temperature distribution and time constant of a thermoelectric MEMS microwave power sensor, a 3-D equivalent circuit model was established. Firstly, the equivalent circuit model was established based on the equivalent relationship of thermal parameter and electrical parameter with the structural of sensor. Then the unit module of the equivalent circuit was analyzed theoretically. Finally, the temperature distribution and response time of the sensor were studied according to the 3-D equivalent circuit model. The sensitivity of the sensor is 0.076 mV/mW @10 GHz, and the time constant is 56.24 μs from the model. The measured results show that the sensitivity of the sensor is 0.06 mV/mW @10 GHz, and the time constant is 85 μs. The 3-D equivalent circuit model established in this paper can not only obtain the time constant of microwave power sensor, but also accurately obtain the heat dissipation in the substrate. Therefore, this work has a certain reference value for thermoelectric MEMS microwave power sensors.