MEMS微波功率传感器的三维等效电路模型
[1] SONG X, LI J, FAN Y, et al. Six-port direct modulator with carrier suppression technology for high-speed high-frequency wireless communications [J]. IEEE Microw Wirel Compon Lett, 2017, 27(8): 745-747.
[2] ZHANG F, PAN S. Microwave photonic signal generation for radar applications [C]// IEEE iWEM. Nanjing, China. 2016: 1-3.
[3] NAKARMI B, CHEN H, WON Y H, et al. Microwave frequency generation, switching, and controlling using single-mode FP-LDs [J]. J Light Tech, 2018, 36(19): 4273-4281.
[4] 张焕卿, 白雪婧, 王德波,等. 热电式MEMS微波功率传感器模型的研究 [J]. 仪器仪表学报, 2018, 39(1): 113-120.
[5] YAN J B, LIAO X P. Research on the response time of indirect-heating microwave power sensor [J]. IEEE Sensors J, 2016, 16(13): 5270-5276.
[6] ZHANG Z, MA Y. DC-25 GHz and low-loss MEMS thermoelectric power sensors with floating thermal slug and reliable back cavity based on GaAs MMIC technology [J]. Micromachines, 2018, 9(4): 154.
[7] 田涛, 廖小平. 一种新型MEMS微波功率传感器的设计与模拟 [J]. 传感技术学报, 2008, 21(4): 611-614.
[8] 韩磊, 黄庆安, 廖小平. 热电式微波功率传感器的优化设计 [J]. 半导体学报, 2008, 29(4): 789-793.
[9] 王德波, 廖小平. 对称式微波功率传感器的设计 [J]. 光学精密工程, 2011, 19(1): 110-117.
[11] MILANOVIC V, HOPCROFT M, ZINCKE C A, et al. Optimization of CMOS MEMS microwave power sensors [C]// IEEE ISCAS. Orlando, FL, USA. 1999: 144-147.
[12] LIU T, LIAO X P. Simulation of characteristic of a thermoelectric power sensor based on MEMS technology [J]. Key Engineer Mater, 2012, 503: 91-96.
[13] YI Z X, LIAO X P. A 3D model of the thermoelectric microwave power sensor by MEMS technology [J]. Sensors, 2016, 16(6): 921.
[14] HAN J Z, LIAO X P. Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor [J]. J Micromech Microeng, 2016, 26(9): 094001.
[15] LI J H, LIAO X P, CHU C. Electromagnetic- thermal-electric analysis of indirectly-heated RF MEMS power sensors with different terminal resistor dimensions [J]. IEEE Sensors J, 2021, 21(4): 4342-4349.
于文婷, 唐姝婷, 辛泽辉, 王德波. MEMS微波功率传感器的三维等效电路模型[J]. 微电子学, 2022, 52(4): 663. YU Wenting, TANG Shuting, XIN Zehui, WANG Debo. 3-D Equivalent Circuit Model of MEMS Microwave Power Sensors[J]. Microelectronics, 2022, 52(4): 663.