面向光电子器件的铌酸锂键合技术研究进展
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孔辉, 沈浩, 张忠伟, 钱煜, 濮思麒, 徐秋峰, 王勤峰. 面向光电子器件的铌酸锂键合技术研究进展[J]. 压电与声光, 2023, 45(6): 926. KONG Hui, SHEN Hao, ZHANG Zhongwei, QIAN Yu, PU Siqi, XU Qiufeng, WANG Qinfeng. Research Progress in Lithium Niobate Bonding Technology for Optoelectronic Devices[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 926.