为了便于驱动谐振梁的反对称模态，提高加速度检测灵敏度，该文提出了一种分布式的电极驱动方式，利用分布式电极更易驱动谐振梁的反对称模态并检测信号。设计了弹性梁质量块系统，用作感知外部加速度的敏感质量，并将谐振梁作为测量加速度的敏感元件。建立了谐振梁前两阶动力学方程。实验测量了不同加速度下谐振梁一阶、二阶的频率变化。实验表明，二阶模态检测正向灵敏度比一阶模态检测正向灵敏度提高了49%，负向灵敏度提高了89%，且二阶模态品质因数是一阶模态品质因数的3.19倍。最后分析了偏置直流电压对灵敏度的影响：随着电压提高，正向加速度检测灵敏度提高，负向加速度检测灵敏度降低。

In order to facilitate the driving of the antisymmetric mode of the resonant beam and improve the sensitivity of acceleration detection, a distributed electrode driving method is proposed in this paper. The distributed electrode can drive the antisymmetric mode of the resonant beam and detect the signal more easily. The elastic beam mass block system is designed to be used as the sensitive mass for sensing external acceleration, and the resonant beam is used as the sensitive element for measuring acceleration. The first two order dynamics equations of the resonant beam are established. The first and second order frequencies of the resonant beam are measured under different accelerations. The experimental results show that the positive sensitivity of the second order mode detection is increased by 49% and the negative sensitivity is increased by 89%, and the quality factor of the second order mode detection is 3.19 times that of the first order mode. Finally, the influence of bias DC voltage on sensitivity is analyzed. With the increase of voltage, the sensitivity of positive acceleration detection increases, while the sensitivity of negative acceleration detection decreases.