基于反对称模态驱动的MEMS加速度计灵敏度优化方法
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刘晨, 武焕臣, 洪逸飞, 王发光, 李磊. 基于反对称模态驱动的MEMS加速度计灵敏度优化方法[J]. 压电与声光, 2023, 45(5): 723. LIU Chen, WU Huanchen, HONG Yifei, WANG Faguang, LI Lei. Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 723.