声表面波(SAW)谐振器作为各类SAW器件的核心元件, 其性能决定SAW器件的各项指标, 其中以谐振器品质因数(Q）值最重要。该文介绍了影响SAW谐振器Q值的因素, 指出目前高Q值SAW谐振器的衬底结构大多为异质声学层结构, 且异质声学层结构本质为一维声子晶体。结果表明, 通过在谐振器的多个位置构建声子晶体对SAW谐振器的声场能量可实现全三维约束, 以提升谐振器Q值, 最后展望了高Q值SAW谐振器的理想结构。

As the core element of various surface acoustic wave (SAW) devices, the performance of SAW resonator determines various specifications of SAW devices, among which the quality factor (Q) of resonator is the most important. The factors affecting the Q value of SAW resonators are introduced in this paper. It is pointed out that most of the substrate structure of SAW resonator with high Q is heterogeneous acoustic layer structure, and the heterogeneous acoustic layer structure is essentially one-dimensional phononic crystal. The results show that the Q value of the resonator can be improved by constructing phononic crystals at multiple positions to fully 3-D constrain the acoustic field energy of SAW resonator. Finally, the possible ideal structure of SAW resonator with high Q in the future is prospected.