太赫兹科学与电子信息学报, 2018, 16 (5): 776, 网络出版: 2019-06-10
UV LIGA技术在毫米波太赫兹器件中的应用进展
Progress in application and research of UV LIGA techniques in millimeter wave and terahertz devices
紫外光刻电铸和微成型 高频结构 毫米波太赫兹器件 Ultraviolet Lithographie Galvanoformung Abformung high frequency structure millimeter wave and terahertz devices
摘要
采用紫外光刻电铸和微成型(UV LIGA)技术制造太赫兹真空器件的高频结构，频率为94~220 GHz。对于94 GHz高频结构，尺寸误差≤15 μm，采用此高频结构的脉冲行波管输出功率大于100 W；180 GHz高频结构，尺寸误差≤5 μm，采用此高频结构的太赫兹行波管二倍频器输出功率高于100 mW，带宽为11.4 GHz；220 GHz高频结构，尺寸误差≤3 μm，衰减因子为240 dB/m。UV LIGA技术在太赫兹真空器件中的成功应用，不但为毫米波太赫兹器件研制奠定了基础，同时也为UV LIGA技术在设计制造毫米波太赫兹器件领域，包括有源和无源器件，开辟了一番新天地。
Abstract
A folded waveguide Slow Wave Structure(SWS) with frequency range from 94 to 220 GHz is fabricated with Ultraviolet Lithographie Galvanoformung Abformung(UV LIGA) technology. For 94 GHz folded waveguide SWS, the accuracy is≤15 μm, the output power of 94 GHz pulse Travelling Wave Tube(TWT) with the microfabricated SWS is higher than 100 W. For 180 GHz folded waveguide SWS, the accuracy is≤5 μm, the output power is higher than 100 mW with bandwidth of 11.4 GHz. For 220 GHz folded waveguide SWS, the accuracy is≤3 μm, and the attenuation factor is 240 dB/m.
李含雁, 冯进军. UV LIGA技术在毫米波太赫兹器件中的应用进展[J]. 太赫兹科学与电子信息学报, 2018, 16(5): 776. LI Hanyan, FENG Jinjun. Progress in application and research of UV LIGA techniques in millimeter wave and terahertz devices[J]. Journal of terahertz science and electronic information technology, 2018, 16(5): 776.
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