UV LIGA技术在毫米波太赫兹器件中的应用进展
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李含雁, 冯进军. UV LIGA技术在毫米波太赫兹器件中的应用进展[J]. 太赫兹科学与电子信息学报, 2018, 16(5): 776. LI Hanyan, FENG Jinjun. Progress in application and research of UV LIGA techniques in millimeter wave and terahertz devices[J]. Journal of terahertz science and electronic information technology, 2018, 16(5): 776.
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