台阶聚束AlN高温热退火形貌演化研究
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聂子凯, 贲建伟, 张恩韬, 马晓宝, 张山丽, 石芝铭, 吕顺鹏, 蒋科, 孙晓娟, 黎大兵. 台阶聚束AlN高温热退火形貌演化研究[J]. 人工晶体学报, 2023, 52(6): 1016. NIE Zikai, BEN Jianwei, ZHANG Entao, MA Xiaobao, ZHANG Shanli, SHI Zhiming, LYU Shunpeng, JIANG Ke, SUN Xiaojuan, LI Dabing. Evolution of AlN Step Bunching Morphology During High-Temperature Annealing[J]. Journal of Synthetic Crystals, 2023, 52(6): 1016.