压电与声光, 2022, 44 (2): 294, 网络出版: 2022-06-14
压电MEMS扬声器的设计与优化
Design and Optimization of Piezoelectric MEMS Speakers
压电 微机电系统(MEMS) 扬声器 声压级 刚性-柔性耦合 piezoelectric micro-electro-mechanical systems(MEMS) speaker sound pressure level rigid-flexible coupling
摘要
为了提高压电微机电系统(MEMS)扬声器的声压级,该文提出了一种新型的扬声器振膜结构,该结构由4个相同的扇环驱动单元和中间圆形质量块组成,并在上表面覆有一层柔性材料,形成刚性-柔性耦合封闭振动膜。优化该结构中圆形质量块半径r2和相邻扇环的相邻边夹角θ等参数。结果表明,当θ=50°,r2=700 μm时,声压级最大。在保证振膜面积相同和谐振频率基本一致的情况下,与优化后的固支圆形多层振膜相比,该文所提出的新型结构声压级高5 dB。
Abstract
In order to improve the sound pressure level(SPL) of piezoelectric micro-electro-mechanical systems(MEMS) speakers, a novel speaker diaphragm structure is proposed in this paper, The structure consists of four identical fan-ring driving units and a circular mass block in the middle, and the upper surface is covered with a layer of flexible material, forming a rigid-flexible-coupling sealed vibration membrane, The parameters such as radius r2 of the circular mass block and angle θ of adjacent fan rings were optimized, It was found that the maximum SPL was obtained when θ=50° and r2 =700 μm, The sound pressure level of the novel structure proposed in this paper is 5 dB higher than that of the optimized clamped circular multilayer diaphragm under the condition that the diaphragm area is the same and the resonant frequency is basically the same,
汪晓洁, 安志武. 压电MEMS扬声器的设计与优化[J]. 压电与声光, 2022, 44(2): 294. WANG Xiaojie, AN Zhiwu. Design and Optimization of Piezoelectric MEMS Speakers[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 294.