压电与声光, 2022, 44 (2): 294, 网络出版: 2022-06-14  

压电MEMS扬声器的设计与优化

Design and Optimization of Piezoelectric MEMS Speakers
作者单位
1 中国科学院 声学研究所 声场声信息国家重点实验室,北京 100190
2 中国科学院大学,北京 100049
摘要
为了提高压电微机电系统(MEMS)扬声器的声压级,该文提出了一种新型的扬声器振膜结构,该结构由4个相同的扇环驱动单元和中间圆形质量块组成,并在上表面覆有一层柔性材料,形成刚性-柔性耦合封闭振动膜。优化该结构中圆形质量块半径r2和相邻扇环的相邻边夹角θ等参数。结果表明,当θ=50°,r2=700 μm时,声压级最大。在保证振膜面积相同和谐振频率基本一致的情况下,与优化后的固支圆形多层振膜相比,该文所提出的新型结构声压级高5 dB。
Abstract
In order to improve the sound pressure level(SPL) of piezoelectric micro-electro-mechanical systems(MEMS) speakers, a novel speaker diaphragm structure is proposed in this paper, The structure consists of four identical fan-ring driving units and a circular mass block in the middle, and the upper surface is covered with a layer of flexible material, forming a rigid-flexible-coupling sealed vibration membrane, The parameters such as radius r2 of the circular mass block and angle θ of adjacent fan rings were optimized, It was found that the maximum SPL was obtained when θ=50° and r2 =700 μm, The sound pressure level of the novel structure proposed in this paper is 5 dB higher than that of the optimized clamped circular multilayer diaphragm under the condition that the diaphragm area is the same and the resonant frequency is basically the same,
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汪晓洁, 安志武. 压电MEMS扬声器的设计与优化[J]. 压电与声光, 2022, 44(2): 294. WANG Xiaojie, AN Zhiwu. Design and Optimization of Piezoelectric MEMS Speakers[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 294.

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