该文设计了一种具有高灵敏度、低交叉耦合的双轴谐振式微加速度计, 使用工型梁作为解耦梁, 通过微杠杆机构实现力的放大, 结构呈中心对称形式, 采用差分检测工作方式。通过仿真分析对结构进行优化并完成加速度计整体结构设计, 进而提高加速度计灵敏度, 降低交叉耦合。对加速度计结构进行模态分析、灵敏度分析、交叉耦合分析和谐响应分析, 结果表明, 在±20g量程范围内, x向标度因数为423.6 Hz/g, y向标度因数为421.8 Hz/g, x向交叉灵敏度为0.000 047%, y向交叉灵敏度为0.000 78%。仿真结果验证了所设计结构的可行性。

A biaxial resonant micro accelerometer with high sensitivity and low cross coupling is designed in this paper. The I-beam is used as the decoupling beam, and the force is amplified by the micro lever mechanism. The structure is symmetrical in the center, and the differential output method is used to detect the signal. The structure is optimized through simulation analysis and the overall structure design of the accelerometer is completed, so as to improve the sensitivity of the accelerometer and reduce the cross coupling. The modal analysis, sensitivity analysis, cross coupling analysis and harmonic response analysis of the accelerometer structure are carried out. The results show that within the range of ±20g, the x-direction scale factor is 423.6 Hz/g, the y-direction scale factor is 421.8 Hz/g, the x-direction cross sensitivity is 0.000 047%, and the y-direction cross sensitivity is 0.000 78%. The simulation results verify the feasibility of the designed structure.