为了探究泵腔结构参数对压电气体隔膜泵性能的影响，该文设计了一种压电气体隔膜泵的泵腔结构。首先简述了泵腔的结构设计与工作原理，推导出泵腔出口气流速度的表达式，通过仿真得出泵腔高度、气孔直径对腔体内的瞬时气压、气流速度及气体流量的影响。最后制作了泵腔样机并应用在压电气体隔膜泵中，进行了实验测试及理论分析对比。结果表明，实验结果与理论分析相吻合，输出流量随着腔高的增大而减小，随着气孔直径的增大而增大，这为压电气体微泵的腔体设计提供了理论参考。

In order to investigate the influence law of pump chamber structure parameters on the performance of piezoelectric gas diaphragm pump, a pump chamber structure of piezoelectric gas diaphragm pump was designed, Firstly, the structural design and working principle of the pump chamber are briefly described, and the expression of the relationship between the airflow velocity at the outlet of the pump chamber is derived, and the relationship between the height of the pump chamber and the diameter of the air hole on the instantaneous air pressure, airflow velocity and gas flow in the chamber is obtained through simulation, Finally, a pump cavity is machined and applied to a piezoelectric gas diaphragm pump, and experimental tests and the theoretical analysis are conducted, and experimental results are consistent with the theoretical analysis, The output flow rate decreases with increasing cavity height and increases with increasing orifice diameter, Provides a theoretical reference for the design of the cavity of the piezoelectric gas micropump,