高频声表面波液滴雾化器设计与实验研究

针对现有的雾化装置粒径分散较广及难以生成大量微米级与亚微米级液滴等问题，设计并加工了一种基于声表面波的液滴雾化装置。首先，利用COMSOL仿真软件对声表面波器件的结构建模并进行压电仿真分析，模拟声表面波的振动传播，得到其谐振频率为18.269 MHz。其次，基于声-压电耦合多物理场模拟声波在固-液界面的衍射，以及在液体中的传播过程。最后，加工声表面波雾化实验装置并进行液滴雾化实验，通过调整激励信号频率与输入功率实现了液滴的稳定雾化，对雾化后的液滴粒径分布进行测试。实验结果表明，当输入信号幅值为420 mV，谐振频率为19.259 MHz时，该装置生成大量微米级细小液滴，液滴粒径基本呈三峰分布，主要集中在3 μm、30 μm与500 μm。

Abstract

A liquid droplet atomization device based on surface acoustic waves was designed and fabricated to address the issues of high energy loss, wide particle size distribution, and difficulty in generating large quantities of micro- and submicron-sized droplets using current atomization devices. First, the structure of the surface acoustic wave device was modeled using COMSOL simulation software and subjected to piezoelectric simulation analysis, simulating the vibration propagation of the surface acoustic wave and obtaining a resonant frequency of 18.269 MHz. Second, based on the acoustic-piezoelectric coupling multiphysics field, the diffraction of sound waves at the solid-liquid interface and the propagation of sound waves in the liquid were simulated. Finally, a surface acoustic wave atomization experimental device was fabricated to perform liquid droplet atomization experiments. By adjusting the excitation signal frequency and input power, stable atomization of droplets is achieved, and the droplet size distribution after atomization is tested. The experimental results showed that under the conditions of an input signal amplitude of 420 mV and a resonant frequency of 19.259 MHz, the device generated a large number of small micron-sized droplets with a droplet size distribution showing three peaks mainly concentrated at 3 μm, 30 μm, and 500 μm.

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舒霞云, 陈赛, 常雪峰, 欧阳丽. 高频声表面波液滴雾化器设计与实验研究[J]. 压电与声光, 2023, 45(5): 667. SHU Xiayun, CHEN Sai, CHANG Xuefeng4, OUYANG Li. Design and Experimental Study on High-Frequency Surface Acoustic Wave Droplet Atomizer[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 667.

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