为了实现超高速的声光调制, 该文提出了一种光纤耦合声光调制器键合膜系的设计与仿真方法。利用该方法设计并制作了一款工作频率为200 MHz、10 ns光脉冲上升时间的光纤耦合声光调制器。器件采用TeO2作为声光介质, 36°Y-切LiNbO3作为压电换能器晶片, 衬底层采用高纯度Cr, 键合层为高纯度Au, 结果表明器件性能测试良好。

In order to realize ultra-high speed acousto-optic modulation, a method of designing and simulating the bonding membrane system of a fiber optic coupling acousto-optic modulator is presented in this paper. An optical fiber coupled acousto-optic modulator with a working frequency of 200 MHz and a rise time of 10 ns was designed and manufactured by this method。The device uses TeO2 as the acousto-optic medium, 36 ° Y-cut LiNbO3 as the piezoelectric transducer wafer, the substrate layer uses high-purity Cr, the bonding layer is high-purity Au, and the results show that the device performance test is good.