压电与声光, 2020, 42 (4): 484, 网络出版: 2022-04-21
光纤耦合声光调制器键合膜系设计与制备
Design and Preparation of Bonding Membrane System of Optical Fiber Coupling Acousto-optic Modulator
光纤耦合声光调制器 键合膜系 仿真 衬底层 键合层 fiber coupled acousto-optic modulator bonding membrane system simulation substrate layer bonding layer
摘要
为了实现超高速的声光调制, 该文提出了一种光纤耦合声光调制器键合膜系的设计与仿真方法。利用该方法设计并制作了一款工作频率为200 MHz、10 ns光脉冲上升时间的光纤耦合声光调制器。器件采用TeO2作为声光介质, 36°Y-切LiNbO3作为压电换能器晶片, 衬底层采用高纯度Cr, 键合层为高纯度Au, 结果表明器件性能测试良好。
Abstract
In order to realize ultra-high speed acousto-optic modulation, a method of designing and simulating the bonding membrane system of a fiber optic coupling acousto-optic modulator is presented in this paper. An optical fiber coupled acousto-optic modulator with a working frequency of 200 MHz and a rise time of 10 ns was designed and manufactured by this method。The device uses TeO2 as the acousto-optic medium, 36 ° Y-cut LiNbO3 as the piezoelectric transducer wafer, the substrate layer uses high-purity Cr, the bonding layer is high-purity Au, and the results show that the device performance test is good.
参考文献
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刘保见, 陈华志, 曹家强, 刘玲. 光纤耦合声光调制器键合膜系设计与制备[J]. 压电与声光, 2020, 42(4): 484. LIU Baojian, CHEN Huazhi, CAO Jiaqiang, LIU Ling. Design and Preparation of Bonding Membrane System of Optical Fiber Coupling Acousto-optic Modulator[J]. Piezoelectrics & Acoustooptics, 2020, 42(4): 484.