光子学报, 2024, 53 (2): 0212005, 网络出版: 2024-03-28  

基于激光诱导石墨烯的木制惯性测量单元

Wood Inertial Measurement Unit Based on Laser-induced Graphene
李晨 1,2,3,*李浩 1杨研伟 1
作者单位
1 陕西科技大学 机电工程学院,西安 710021
2 西安交通大学 机械工程学院,西安 710049
3 西安交通大学 精密微纳制造技术全国重点实验室,西安 710054
摘要
针对商用低精度惯性测量单元具有高成本、制造工艺复杂、废弃后污染环境、不能生物降解等缺点,提出一种低成本、可生物降解的木制惯性测量单元。该设计包含平衡振子和非平衡振子单元,分别用于测量3轴加速度和3轴角加速度。采用激光诱导石墨烯的工艺在木梁上制备应变传感器阵列,并形成多组惠斯顿电桥测量电路。结果表明:加速度方面,X轴灵敏度为0.006 mV/g,Y轴灵敏度为8.695×10-4 mV/g,Z轴灵敏度为0.200 mV/g;角加速度方面,X轴灵敏度为0.285 mV/(rad/s2),绕Y轴旋转的灵敏度为0.305 mV/(rad/s2),绕Z轴旋转的灵敏度为0.765 mV/(rad/s2)。与有限单元法仿真结果对比,实验测量误差在10%以内,且具有良好的重复测量精度。该惯性测量单元在木制船舶、木制载具、木制家具等方面具有潜在的应用前景。
Abstract
Inertial Measurement Unit (IMU) mainly measures and reports the specific force and angular velocity of an object. It usually consists of a three-axis accelerometer and a three-axis gyroscope. Traditional IMU have complex manufacturing processes and high costs. It is not easy to recycle, pollute the environment and cannot be biodegradable after being discarded. In this study, a kind of wood inertial measurement unit based on Laser-induced Graphene (LIG) is proposed.Camphor pine wood was selected as the sensor frame. The pine is placed in the vacuum chamber and adjust the vacuum degree in the vacuum chamber. Fiber laser and laser vibrators software was used to process LIG resistors at the pine frame resistor locations by adjusting laser frequency, laser power, scan speed, off-focus distance and other parameters, with a resistance value of about 100 Ω, and to connect these resistors into multiple Wheatstone bridges. Due to the sensor's design being symmetrical along the X- and Z-axes, only the Wheatstone bridge on the beam in the X- or Z-axis direction needs to be measured. Different inertial bodies are divided into balanced oscillator unit and unbalanced oscillator unit. The inertial body of the balanced oscillator unit is a spherical inertial body (Cr13), mainly measuring acceleration; The inertial body of the unbalanced dipole element is the inertial wheel (PLA), which mainly measures the angular acceleration. The theoretical formula shows that the acceleration range of IMU along X axis and Z axis is±10 g, the acceleration range along Y axis is -g~+3 g, the angular acceleration range around X axis and Z axis is±8 rad/s2, and the angular acceleration range around Y axis is±23 rad/s2.The product of this study is placed on a sports platform and uses a dynamic signal acquisition system to collect the output voltage of a Wheatstone bridge in the IMU. Through the joint test and comparison of the commercial acceleration sensor and unbalanced oscillator unit, it can be concluded that the designed sensor has the same change as the commercial sensor and has the ability to measure the angular rate. The results of this measurement of the Wheatstone bridge on the Z-axis beam are as follows: The sensitivity of the X-axis acceleration of the balanced oscillator unit is 0, and the sensitivity of the Y-axis acceleration is 8.695×10-4 mV/g, the Z-axis acceleration sensitivity is 0.200 mV/g, and the sensitivity to angular acceleration is 0. The sensitivity of Y-axis acceleration of the unbalanced oscillator unit is 1.110 mV/g, the sensitivity of the X-axis and Z-axis acceleration is 0, the sensitivity of the angular acceleration around the X-axis is 0.285 mV/(rad/s2), the sensitivity of the angular acceleration around the Y-axis is 0.305 mV/(rad/s2), and the sensitivity of the angular acceleration around the Z-axis is 0.765 mV/(rad/s2). By comparing the voltage output of Wheatstone in all directions of IMU under cyclic load, it is concluded that IMU of this design still has the ability to measure the angular rate and other parameters under multiple cyclic loads, so this design has a certain stability.We propose a wooden inertial measurement unit based on laser-induced graphene, which is made of biodegradable materials and has good sensitivity and certain stability. Compared to the IMU on the market, it is more environmentally friendly, cheaper, and more convenient to manufacture, with environmental advantages and market prospects. It can be used in the fields of wooden ships, vehicle engineering, or wooden buildings that require vibration measurement. In future research, the size of this wooden IMU can be further optimized, and element doping can be applied to LIG varistors to improve their conductivity and sensitivity.

李晨, 李浩, 杨研伟. 基于激光诱导石墨烯的木制惯性测量单元[J]. 光子学报, 2024, 53(2): 0212005. Chen LI, Hao LI, Yanwei YANG. Wood Inertial Measurement Unit Based on Laser-induced Graphene[J]. ACTA PHOTONICA SINICA, 2024, 53(2): 0212005.

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