单压电陶瓷驱动回转定位平台实验分析

为了能够实现高精度的微纳米级转动，该文基于柔性铰链设计了一种单压电陶瓷驱动的纯转动微定位平台。平台采用圆周阵列式柔性梁实现运动导向与解耦，通过杠杆机构增大动平台转动行程。首先通过有限元仿真验证了圆周阵列式柔性梁对动平台轴心漂移的抑制作用，然后通过实验对其运动特征进行测试与分析。测试结果表明，该机构具有良好的回转精度，在x轴正方向轴心漂移量为0~0.23 μm，y轴负方向轴心漂移量为0~4.59 μm，旋转弧度可达916 μrad，旋转精度为0.53 μrad。轴心漂移补偿后整体误差最大为4.9%。

Abstract

In order to achieve precise micro and nano-level rotation, a pure rotational micro-positioning platform driven by a single piezoelectric ceramic was designed based on a flexure hinge. The platform utilizes circular array flexible beams to realize motion guidance and decoupling, and increases the rotation range of the moving platform through a lever mechanism. Firstly, the restraining effect of the circular array flexible beam on the axial drift of the moving platform is verified through finite element simulation. Subsequently, the experiment is conducted to examine and analyze the motion characteristics of the flexible beam. The test results indicate that the mechanism exhibits good rotational accuracy, the axis drift is 0-0.23 μm in the positive direction of x axis and 0-4.59 μm in the negative direction of y axis, the rotation radian is up to 916 μrad, and the rotation accuracy is 0.53 μrad. The overall error after compensating for axial drift is 4.9% at most.

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马鹏飞, 崔良玉, 钟俊杰, 韩建鑫. 单压电陶瓷驱动回转定位平台实验分析[J]. 压电与声光, 2023, 45(6): 917. MA Pengfei, CUI Liangyu, ZHONG Junjie, HAN Jianxin. Experimental Analysis of Rotary Positioning Platform Driven by Single Piezoelectric Ceramic[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 917.

单压电陶瓷驱动回转定位平台实验分析

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