压电MEMS兰姆波器件技术的最新进展与展望
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于晓权, 何杰, 马晋毅. 压电MEMS兰姆波器件技术的最新进展与展望[J]. 压电与声光, 2022, 44(2): 223. YU Xiaoquan, HE Jie, MA Jinyi. Recent Advances and Prospects of Lamb Wave Devices Based on Piezo-MEMS[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 223.