激光与光电子学进展, 2017, 54 (11): 113103, 网络出版: 2017-11-17  

磁控溅射法制备氧化钨薄膜的膜层微观结构对电致变色性能的影响 下载: 887次

Effect of Film Micro-Structure of Tungsten Oxide Films Deposited by Magnetron Sputtering on Electrochromic Performance
作者单位
1 常州亚玛顿股份有限公司光电玻璃省重点实验室, 江苏 常州 213000
2 常州大学光伏科学与工程协同创新中心, 江苏 常州 213000
摘要
利用磁控溅射法,在不同工作压强下制备了氧化钨(WO3)薄膜,研究了工作压强对WO3膜层微观结构的调控作用,并研究了WO3膜层微观结构对其电致变色性能的影响。研究结果表明,制备的WO3薄膜属于非晶相,表面呈峰状结构;随着工作压强的增大,WO3薄膜膜层微观结构变疏松,电致变色响应时间和循环寿命均减短;在最佳膜层微观结构下,WO3薄膜光学密度可达0.64,循环寿命达1500周。
Abstract
By the magnetron sputtering method, the tungsten oxide (WO3) films are prepared under different working pressures. The regulating effect of working pressure on WO3 film microstructure is studied, and the effect of WO3 film microstructure on its electrochromic performance is also investigated. The study results show that the prepared WO3 film is with an amorphous phase and its surface presents a peak-shaped structure. With the increase of working pressure, the WO3 film microstructure becomes loose, and the electrochromic response time and the cycle lifetime are shorten. Under the optimal film microstructure condition, the optical density of WO3 films is 0.64 and the cycle lifetime is up to 1500 cycles.
参考文献

[1] Deb S K. Optical and photoelectric properties and colour centres in thin films of tungsten oxide[J]. Philosophical Magazine, 1973, 27(4): 801-822.

[2] Dong D M, Wang W W, Dong G B, et al. Electrochromic properties of NiOx∶H films deposited by DC magnetron sputtering for ITO/NiOx∶H/ZiO2/WO3/ITO device[J]. Applied Surface Science, 2015, 357: 799-805.

[3] 张建鹏, 黄美东, 李园, 等. 磁控溅射功率对光学氧化钒薄膜结构和性能的影响[J]. 中国激光, 2015, 42(8): 0807001.

    Zhang Jianpeng, Huang Meidong, Li Yuan, et al. Effects of RF magnetron sputtering power on structure and properties of the optical vanadium oxide films[J]. Chinese J Lasers, 2015, 42(8): 0807001.

[4] 张易君, 张粞程, 栾明昱, 等. NbSiN薄膜的制备及光学性能研究[J]. 激光与光电子学进展, 2017, 54(3): 033101.

    Zhang Yijun, Zhang Xicheng, Luan Mingyu, et al. Preparation and optical property of NbSiN films[J]. Laser & Optoelectronics Progress, 2017, 54(3): 033101.

[5] Madhavi V, Jeevan Kumar P, Kondaiah P, et al. Effect of molybdenum doping on the electrochromic properties of tungsten oxide thin films by RF magnetron sputtering[J]. Ionics, 2014, 20(12): 1737-1745.

[6] 孙喜莲, 方燕群, 曹洪涛. 钽掺杂氧化钨薄膜电致变色性能[J]. 光学学报, 2014, 34(10): 1031001.

    Sun Xilian, Fang Yanqun, Cao Hongtao. Electrochromic properties of Ta doped tungsten oxide thin films[J]. Acta Optica Sinica, 2014, 34(10): 1031001.

[7] Yin Y, Lan C Y, Guo H Y, et al. Reactive sputter depositon of WO3/Ag/WO3 film for indium tin oxide (ITO)-free electrochromic devices[J]. ACS Applied Materials & Interfaces, 2016, 8(6): 3861-3867.

[8] Ma D Y, Shi G Y, Wang H Z, et al. Morphology-tailored synthesis of vertically aligned 1D WO3 nano-structure films for highly enhanced electrochromic performance[J]. Journal of Materials Chemistry A, 2013, 1(3): 684-691.

[9] Feng W, Wu G M, Gao G H. Ordered mesoporous WO3 film with outstanding gasochromic properties[J]. Journal of Materials Chemistry A, 2014, 2(3): 585-590.

[10] 温佳星, 王美涵, 彭洋. 磁控溅射沉积气致变色WO3薄膜研究进展[J]. 中国材料进展, 2016, 35(1): 57-62.

    Wen Jiaxing, Wang Meihan, Peng Yang. Progress in gasochromic WO3 thin films deposited by magnetron sputtering[J]. Materials China, 2016, 35(1): 57-62.

[11] 罗乐平, 赵青南, 刘旭, 等. 基片温度对直流反应磁控溅射法制备氧化钨电致变色材料循环寿命的影响[J]. 硅酸盐通报, 2016, 35(6): 1847-1850.

    Luo Leping, Zhao Qingnan, Liu Xu, et al. Influence of substrate temperatures on the cyclic life of electrochromic tungsten oxide (WO3) films deposited by reaction DC magnetron sputtering[J]. Bulletin of the Chinese Ceramic Society, 2016, 35(6): 1847-1850.

[12] Wang Y Q, Chu W J, Wang S S, et al. Simple synthesis and photoelectrochemical characterizations of polythiophene/Pd/TiO2 composite microspheres[J]. ACS Applied Materials & Interfaces, 2014, 6(22): 20197-20204.

[13] Kattouf B, Ein-Eli Y, Siegmann A, et al. Hybrid mesostructured electrodes for fast-switching proton-based solid state electrochromic devices[J]. Journal of Materials Chemistry C, 2013, 1(1): 151-159.

[14] Kraft A, Rottmann M, Heckner K-H. Large-area electrochromic glazing with ion-conducting PVB interlayer and two complementary electrodeposited electrochromic layers[J]. Solar Energy Materials and Solar Cells, 2016, 90(4): 469-476.

[15] Huang H, Tian J, Zhang W K, et al. Electrochromic properties of porous NiO thin film as a counter electrode for NiO/WO3 complementary electrochromic window[J]. Electrochimica Acta, 2011, 56(11): 4281-4286.

初文静, 张喜强, 施瑕玉, 郑友伟, 林俊良, 陈明亿, 林金锡, 林金汉, 袁宁一. 磁控溅射法制备氧化钨薄膜的膜层微观结构对电致变色性能的影响[J]. 激光与光电子学进展, 2017, 54(11): 113103. Chu Wenjing, Zhang Xiqiang, Shi Xiayu, Zheng Youwei, Lin Junliang, Chen Mingyi, Lin Jinxi, Lin Jinhan, Yuan Ningyi. Effect of Film Micro-Structure of Tungsten Oxide Films Deposited by Magnetron Sputtering on Electrochromic Performance[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113103.

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