亚稳态氖原子光刻的实验研究
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霍芸生, 蔡惟泉, 曾庆林, 鄢和明, 王育竹. 亚稳态氖原子光刻的实验研究[J]. 中国激光, 2003, 30(1): 22. 霍芸生, 蔡惟泉, 曾庆林, 鄢和明, 王育竹. Experimental Study on Metastable-neon Atom Lithography[J]. Chinese Journal of Lasers, 2003, 30(1): 22.