DC磁控溅射制备的TiNx薄膜组分及性能分析
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李海翼, 赖珍荃, 朱秀榕, 胡敏. DC磁控溅射制备的TiNx薄膜组分及性能分析[J]. 红外与毫米波学报, 2010, 29(4): 245. LI Hai-Yi, LAI Zhen-Quan*, ZHU Xiu-Rong, HU Min. COMPOSITION AND PROPERTIES OF TiNx THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING[J]. Journal of Infrared and Millimeter Waves, 2010, 29(4): 245.