中心波长121.6 nm 的真空紫外窄带滤光片设计和制备

付联效; 吴永刚; 郑秀萍; 王振华; 彭东功; 焦宏飞; 曹鸿; 吕刚; 周洪军; 霍同林

光学学报, 2008, 28 (12): 2427, 网络出版: 2008-12-17

中心波长121.6 nm 的真空紫外窄带滤光片设计和制备

Design and Preparation of Narrowband Filter with Central Wavelength 121.6 nm in Vacuum Ultraviolet Region

论文大纲

付联效 ^1,*吴永刚 ¹郑秀萍 ¹王振华 ¹彭东功 ¹焦宏飞 ¹曹鸿 ¹吕刚 ¹周洪军 ²霍同林 ²

作者单位

¹ 同济大学精密光学工程技术研究所, 上海 200092

² 合肥国家同步辐射实验室, 合肥 230029

薄膜光学窄带滤光片峰值透射率通带半宽度制备 thin film optics narrowband filter peak transmittance half-peak bandwidth preparation

摘要

采用双半波法布里-珀罗(F-P)干涉滤光片结构设计了中心波长在121.6 nm 的窄带滤光片,其峰值透射率为6.78%,通带半宽度为10.7 nm。通过设计、制备和测量峰值波长在217 nm的滤光片验证了设计用到的光学常数和膜厚定标都比较精确。在此基础上制备了121.6 nm的窄带滤光片,到合肥同步辐射实验室测量的结果是中心波长在120.74 nm,峰值透射率为5.94%,通带半宽度为12 nm。可以看出实际制备的滤光片和预先设计的基本吻合但还是有一定的偏差,最后对实际测量的和理论设计的偏差进行了分析。

Abstract

The narrowband filter with central wavelength of 121.6 nm is designed based on the double half-wave Fabry-Pérot interference filter, with peak transmittance of 6.783% and half-peak bandwidth is 10.7 nm. A filter with the peak wavelength of 217 nm is designed, prepared and measured, and optical constants and scale of film thickness are precise. The filter with central wavelength of 121.6 nm is prepared based on the 217 nm filter,the transmittance of filter is measured with the central wavelength of 120.74 nm, the peak transmittance of 5.94%, the half-peak bandwidth of 12 nm. The prepared filter is in accordance with prediction design in advance generally. At last the difference between experimental value and theoretical value is analysed.

参考文献

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付联效, 吴永刚, 郑秀萍, 王振华, 彭东功, 焦宏飞, 曹鸿, 吕刚, 周洪军, 霍同林. 中心波长121.6 nm 的真空紫外窄带滤光片设计和制备[J]. 光学学报, 2008, 28(12): 2427. Fu Lianxiao, Wu Yonggang, Zheng Xiuping, Wang Zhenhua, Peng Donggong, Jiao Hongfei, Cao Hong, Lü Gang, Zhou Hongjun, Huo Tonglin. Design and Preparation of Narrowband Filter with Central Wavelength 121.6 nm in Vacuum Ultraviolet Region[J]. Acta Optica Sinica, 2008, 28(12): 2427.

中心波长121.6 nm 的真空紫外窄带滤光片设计和制备

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