基于动态适应度函数的光源掩模优化方法
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杨朝兴, 李思坤, 王向朝. 基于动态适应度函数的光源掩模优化方法[J]. 光学学报, 2016, 36(1): 0111006. Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 0111006.