中国激光, 2018, 45 (6): 0604001, 网络出版: 2018-07-05
基于白光干涉频域分析的高精度表面形貌测量 
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High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry
图 & 表
图 1. (a)白光干涉时域光强以及各参数示意;(b)频域空间中相位与波数之间的线性关系
Fig. 1. (a) Time-domain intensity of white-light interference pattern and the meaning of the parameters; (b) linear relationship between the phase and the wave number in frequency domain
图 2. 仿真结果。(a)待测样品形貌;(b)含有误差τ的相干形貌;(c)含有局部2π相位突变的相位形貌;(d)不含2π模糊的最终形貌
Fig. 2. Simulation results. (a) Surface profile of the sample to be measured; (b) coherence surface profile with error τ; (c) phase surface profile with local 2π phase jump; (d) final surface profile without any 2π ambiguity
图 3. 局部2π相位突变消除。(a)带有2π突变的截面轮廓;(b)相邻像素点间的2π跳变级数;(c)消除局部相位突变后的最终轮廓
Fig. 3. Elimination of local 2π phase jump. (a) Cross-sectional profile with 2π phase jump; (b) 2π phase-jump order between adjacent pixels; (c) final profile after removing local phase jump
图 5. 微球面结构表面形貌测量结果。(a)相干形貌;(b)带有局部2π相位突变的相位形貌;(c)不含相位模糊的最终形貌
Fig. 5. Surface profile measurement results of micro-spherical structure. (a) Coherence surface profile; (b) phase surface profile with local 2π phase jump; (c) final surface profile without phase ambiguity
图 6. 光栅结构表面形貌测量结果。(a)相干形貌;(b)带有局部2π相位突变的相位形貌;(c)不含相位模糊的最终形貌
Fig. 6. Surface profile measurement results of grating structure. (a) Coherence surface profile; (b) phase surface profile with local 2π phase jump; (c) final surface profile without phase ambiguity
图 7. 微球面结构的截面图。(a)相干形貌截面图及其残差曲线;(b)消除2π模糊后的相位形貌截面图及其残差曲线
Fig. 7. Cross-sectional profile of micro-spherical structure. (a) Cross-sectional profile of the coherence surface and the residual curve; (b) cross-sectional profile of the phase surface and the residual curve after removing 2π phase ambiguity
邓钦元, 唐燕, 周毅, 杨勇, 胡松. 基于白光干涉频域分析的高精度表面形貌测量[J]. 中国激光, 2018, 45(6): 0604001. Qinyuan Deng, Yan Tang, Yi Zhou, Yong Yang, Song Hu. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001.
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