强激光与粒子束, 2013, 25 (9): 2317, 网络出版: 2013-08-28   

溅射功率对碳化硼薄膜组分与力学性能的影响

Influence of sputtering power on components and mechanical properties of boron carbide films
作者单位
1 中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900
2 西华师范大学 物理与电子信息学院, 四川 南充 637002
摘要
采用射频磁控溅射技术,在不同溅射功率条件下制备了碳化硼薄膜,并用X射线光电子能谱(XPS)和傅里叶变换红外吸收光谱(FTIR)对碳化硼薄膜的组分进行了定量表征,分析了功率变化对碳化硼组分的影响。利用纳米压入仪通过连续刚度法(CSM)对碳化硼薄膜的硬度和模量等力学性能进行了分析。研究表明:随着功率的增大,硼与碳更易结合形成B—C键,在功率增大到250 W时,B—C键明显增多;在250 W时,硼与碳的原子分数比出现了最大值5.66;碳化硼薄膜的硬度与模量都随功率的增大呈现出先增大后减小的趋势,且在250 W时均出现了最大值,分别为28.22 GPa和314.62 GPa。
Abstract
Boron carbide films were fabricated by radio frequency magnetron sputtering at different sputtering powers. The structure and components of the boron carbide films were characterized by Xray photoelectron spectroscopy and Fourier transform infrared spectroscopy. Using MTS Nano Indenter XP with CSM method, the hardness and modulus of the boron carbide films were analyzed. The results show that B prefers to combining with C to form B—C bond as the RF power increases. When the sputtering power reaches 250 W, the number of B—C bonds is the most, and the atomic concentration ratio between B and C reaches to the maximum of 5.66. Both the hardness and modulus of the boron carbide films increase firstly and then decrease with the sputtering powers increasing. Both of them reach to the maximum of 28.22 GPa and 314.62 GPa, respectively.
参考文献

[1] Moses E I. The national ignition facility(NIF): a path to fusion energy[J]. Energy Conversion and Management, 2008, 49(7): 1795-1802.

[2] 郑伟,徐姣,张卫江.核用碳化硼制备工艺研究进展[J].现代化工, 2011, 31: 24-27.(Zheng Wei, Xu Jiao, Zhang Weijiang. Progress in preparation of baron carbides used as unclear shielding material. Modern Chemical Industry, 2011, 31(1): 24-27)

[3] 张占文,漆小波,李波.惯性约束聚变点火靶候选靶丸特点及制备研究进展[J].物理学报, 2012, 61(10): 5204-5205.(Zhang Zhanwen, Qi Xiaobo, Li bo. Properties and fabrication status of capsules for ignition targets in inertial confinement fusion experiments. Acta Physica Sinica, 2012, 61(10): 5204-5205)

[4] 林华平,吴卫东,何智兵,等.膜厚对直流磁控溅射Nb薄膜微结构的影响[J].强激光与粒子束, 2008, 20(3): 413-418.(Lin Huaping, Wu Weidong, He Zhibing, et al. Effects of thickness on microstructure and properties of niobium films deposited by DC magnetron sputtering. High Power Laser and Particle Beams, 2008, 20(3): 413-418)

[5] 程丙勋,吴卫东,何智兵,等.溅射功率对直流磁控溅射Ti膜结构的影响[J]. 强激光与粒子束, 2006, 18(6): 961-965.(Cheng Bingxun, Wu Weidong, He Zhibing, et al. Effects of sputtering power on structure and properties of Ti films deposited by DC magnetron sputtering. High Power Laser and Particle Beams, 2006, 18(6): 961-965)

[6] Lousa A, Gimeno S. Ionassisted deposition of thin films by substrate tuned radio frequency magnetron sputtering[J]. Journal of Vacuum Science & Technology A, 1997, 15(1/2): 62-65.

[7] Pascual E, Martinez E, Esteve J, et al. Boron carbide thin films deposited by tuned substrate RF magnetron sputtering [J]. Diamond and Related Materials, 1999(8): 402-405.

[8] Burnham A K, Alford C S, Makowiecki D M, et al. Evaluation of B4C as an ablator material for NIF capsules[J]. Fus Technol, 1997, 31: 456-458.

[9] 杨水长,廖志君,刘振良,等.碳化硼薄膜的电子束蒸发制备及表面分析[J].稀有金属材料与工程, 2009, 38(s2): 564-567.(Yang Shuichang, Liao Zhijun, Liu Zhenliang, et al. Fabrication and surface analysis of boron carbide thin films by electron beam evaporation. Rare Metal Materials and Engineering, 2009, 38(s2): 564-567)

[10] 周向阳,蒋庄德,王海容,等.纳米压入法测试薄膜力学性能的若干关键影响因素分析[J].机械强度, 2007, 29(5): 737-740.(Zhou Xiangyang, Jiang Zhuangde, Wang Hairong, et al. Investigation on several crucial factors influencing the measurement of mechanical properties of thin films by nanoindentation technique. Journal of Mechanical Strength, 2007, 29(5): 737-740)

[11] Ouyang J H, Sasaki S. Friction and wear characteristics of a Ticontaining diamondlike carbon coating with a SRV tester at high contact load and elevated temperature[J]. Surf Coat Technol, 2005, 195(23): 234-244.

[12] 吴刚.材料结构表征及应用[M].北京:化学工业出版社, 2001: 454456.(Wu Gang. Materials structural characterization and applications. Beijing: Chemical Industry Press, 2001: 454-456)

[13] Jacobsohn L G, Schulze R K, Nastasi M, et al. Xray photoelectron spectroscopy investigation of boron carbide films deposited by sputtering[J]. Surface Science, 2004, 572: 418-421.

[14] 张颖,何智兵,闫建成,等.工作压强对硅掺杂辉光放电聚合物结构和性能的影响[J].物理学报, 2011, 60(6): 6803-6804.(Zhang Ying, He Zhibing, Yan Jiancheng, et al. Influence of pressure on structure and properties of Sidoped glow discharge polymer film. Acta Physica Sinica, 2011, 60(6): 6803-6804)

[15] 田民波,刘德令.薄膜科学与技术手册[M].北京:机械工业出版社, 1991: 402-403.(Tian Minbo, Liu Deling. The film science and technical manual. Beijing: China Machine Press, 1991: 402-403)

[16] Su G T, Hieda H. Field emission characteristics of boron carbon nit ride films synthesized by plasmaassisted chemical vapor deposition[J]. Diamond and Related Materials, 2000, 9(3/6): 1233-1236.

[17] 吴刚. 材料结构表征及应用[M].北京: 化学工业出版社, 2001: 15-21.(Wu Gang. Materials structural characterization and applications. Beijing: Chemical Industry Press, 2001: 15-21)

[18] 王玉新, 郑亚茹, 宋哲, 等. FTIR法研究BCN薄膜的内应力[J]. 光谱学与光谱分析, 2008, 28(7): 1526-1527.(Wang Yuxin, Zheng Yaru, Song Zhe, et al. FTIR spectroscopic studies of inner stress on boron carbon nitride thin films. Spectroscopy and Spectral Analysis, 2008, 28(7): 1526-1527)

张玲, 何智兵, 李俊, 许华, 谌家军. 溅射功率对碳化硼薄膜组分与力学性能的影响[J]. 强激光与粒子束, 2013, 25(9): 2317. Zhang Ling, He Zhibing, Li Jun, Xu Hua, Chen Jiajun. Influence of sputtering power on components and mechanical properties of boron carbide films[J]. High Power Laser and Particle Beams, 2013, 25(9): 2317.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!