沉积工艺对YbF3薄膜可靠性的影响
[1] Ferrante R A, Paloian M A. Visible/long-wave infrared dichroic beam splitter[J]. Optical Engineering, 2005, 44(6): 063801.
[2] Xiong S M, Zhang Y D. Optical coatings for deuterium fluoride chemical laser systems[J]. Applied Optics, 1997, 36(21): 4958-4961.
[3] 庄秋慧, 刘国军, 付秀华, 等. 工作波段覆盖近紫外到近红外波的消偏振分色片的设计与研制[J]. 光学学报, 2016, 36(11): 1131001.
[4] 付秀华, 熊仕富, 刘冬梅, 等. 大角度宽光谱红外成像系统灰度调节膜的研制[J]. 光学学报, 2016, 36(5): 0531001.
[5] Rudisill J E, Braunstein M, Braunstein A I. Optical coatings for high energy ZnSe laser windows[J]. Applied Optics, 1974, 13(9): 2075-2080.
[6] Zhang Y. Defect study on several fluoride coatings[J]. Proceedings of SPIE, 2009, 7283: 72832Q.
[7] Zhang Y P, Fan J Q, Long G Y, et al. Influence of deposition parameters on residual stress of YbF3 thin film[J]. Proceedings of SPIE, 2015, 9796: 97960N.
[8] 苏伟涛. 长波红外低折射率材料研究[D]. 上海: 中国科学院上海技术物理研究所, 2007: 11.
Su W T. Research of long-wave infrared low refractive index materials[D]. Shanghai: Shanghai Institute of Technical Physics of the Chinese Academy of Sciences, 2007: 11.
[9] Davis C A. A simple model for the formation of compressive stress in thin films by ion bombardment[J]. Thin Solid Films, 1993, 226(1): 30-34.
[10] Bilek M M, Mckenzie D R. A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions[J]. Surface & Coatings Technology, 2006, 200: 4345-4354.
冯毅东, 于天燕, 刘定权. 沉积工艺对YbF3薄膜可靠性的影响[J]. 光学学报, 2018, 38(7): 0731002. 冯毅东, 于天燕, 刘定权. Influence of Deposition Process on Reliability of YbF3 Thin Films[J]. Acta Optica Sinica, 2018, 38(7): 0731002.