1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
2 Key Laboratory for Optoelectronics and Communication of Jiangxi Province, Jiangxi Science and Technology Normal University, Nanchang 330013, China
3 State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 110623, China
4 University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing 100049, China
Frontiers of Optoelectronics
2020, 13(4): 409
李耳士 1,2,3,*黄延彬 1,2,3郭祥 1,2,3王一 1,2,3[ ... ]丁召 1,2,3
1 贵州大学大数据与信息工程学院，贵阳 550025
2 半导体功率器件可靠性教育部工程研究中心，贵阳 550025
3 贵州省微纳电子与软件技术重点实验室，贵阳 550025
4 贵州财经大学信息学院，贵阳 550025
为探究Al液滴在GaAs表面的熟化行为，利用液滴外延法在GaAs衬底表面制备Al液滴。在零As压环境下，通过控制退火时间有效控制Al液滴的生长、成核。结合热力学原理和晶体生长理论对样品形貌变化现象进行物理解释，构建出液滴形貌变化过程中熟化、刻蚀和扩散行为的基本模型。理论计算表明，液滴在熟化行为达到退火239 s的平衡点后，被向下刻蚀和向外扩散两个行为同时消耗。
铝液滴 熟化 形貌 液滴外延 aluminum droplet ripening morphology droplet epitaxy
1 College of Food Science & Nutritional Engineering, China Agricultural University, Key Laboratory of Functional Dairy, Ministry of Education, Beijing100083, China
2 Beijing Higher Institution Engineering Research Center of Animal Product, Beijing100083, China
3 Department of Food Science and Human Nutrition, Iowa State University, Iowa 50011, USA
4 College of Science, China Agricultural University, Beijing100094, China
光谱学与光谱分析
2011, 31(7): 1786
