激光器腔面灾变性光学损伤对大功率半导体激光器的最大输出功率和可靠性有很大的负面影响, 是激光器突然失效的主要机制。如何克服腔面灾变性光学损伤, 从而获得高性能的大功率半导体激光器成为重要的研究课题。文章首先对腔面灾变性光学损伤的研究历程进行了简要介绍, 随后论述了腔面灾变损伤的物理机制及热动力学过程, 最后从技术原理、方法、优缺点、改进方法、研究进展及应用现状的角度, 逐一对各种抑制腔面灾变损伤的方法进行了归纳和总结。

全固态皮秒放大器的平均输出功率易受到增益晶体中自聚焦效应的影响。通过引入补偿元件—砷化镓(GaAs)片可以避免自聚焦效应造成的损伤,关于砷化镓的抑制机理对高峰值功率Nd:YAG晶体皮秒放大器系统的进行理论分析和实验研究。以公式计算得到了GaAs材料的非线性折射率系数，并由数值模拟给出了在抑制自聚焦的最佳效果下GaAs片厚度与Nd : YAG棒长度的关系。在入射皮秒激光束中心波长为1 064 nm、重复频率为1 kHz、峰值功率密度为12 GW/cm2的条件下，进行了不同厚度(200 μm和550 μm)GaAs片对抑制Nd:YAG棒自聚焦损伤的实验研究。通过优化GaAs片的厚度，该补偿方法在高峰值功率皮秒脉冲条件下，特别是对于Nd：YAG放大器显示出较高的效率。

实验研究了纳秒激光辐照下不同材料的工程陶瓷表面的抗激光损伤能力, 并与不锈钢、铝合金等金属材料进行了对比.结果表明, 不同材料的工程陶瓷表面抗激光损伤特性不同; 氧化铝陶瓷的损伤阈值最高, 氮化硅陶瓷的损伤阈值较低.与金属材料相比较, 工程陶瓷表面损伤阈值比不锈钢和铝合金高.由于材料的熔点和热传导率等热力学特性不同, 不同的陶瓷材料具有不同的损伤阈值和损伤形貌.理论分析了不同材料抗激光损伤阈值的差异; 陶瓷材料的吸收系数远远小于金属材料, 吸收系数通过影响能量沉积区域和有效热扩散速率影响材料温度的演化过程, 最终影响着材料的激光损伤阈值和损伤特性.实验结果为高功率激光装置中对抗激光损伤能力要求较高的机械支撑材料的选择提供了指导.

In order to monitor the volatilization and deposition of organic contaminants on optics surfaces in high power laser facility, online detection of airborne molecular contaminant was investigated based on quartz crystal microbalance and optical microfiber. First, the response performance of quartz crystal microbalance for different densities of airborne molecular contamination was tested. Then the comparison of quartz crystal microbalance and optical microfiber in detecting the surface mass density of airborne molecular contamination was implemented with the view factor method. The characteristics of airborne molecular contamination deposited on optical surface were also studied. The experiment results show that quartz crystal microbalance and optical microfiber have the similar response performance, and thus they can be applied in online airborne molecular contamination detection. When the surface mass density of airborne molecular contamination is larger than 0.5×10－5g/cm2, optical microfiber is preferred due to the higher precision and larger response speed. The more the density of airborne molecular contamination is, the more it deposits on the optics.

In order to monitor the volatilization and deposition of organic contaminants on optics surfaces in high power laser facility, online detection of airborne molecular contaminant was investigated based on quartz crystal microbalance and optical microfiber. First, the response performance of quartz crystal microbalance for different densities of airborne molecular contamination was tested. Then the comparison of quartz crystal microbalance and optical microfiber in detecting the surface mass density of airborne molecular contamination was implemented with the view factor method. The characteristics of airborne molecular contamination deposited on optical surface were also studied. The experiment results show that quartz crystal microbalance and optical microfiber have the similar response performance, and thus they can be applied in online airborne molecular contamination detection. When the surface mass density of airborne molecular contamination is larger than 0.5×10－5g/cm2, optical microfiber is preferred due to the higher precision and larger response speed. The more the density of airborne molecular contamination is, the more it deposits on the optics.

介绍了高功率980 nm 脊型波导半导体激光器的设计及制造。为了减少腔面处的光功率密度，设计了宽波导结构。利用常规工艺获得了最大500 mW 输出的器件，同时灾变光学损伤阈值达到了560 mW。

为提高940 nm半导体激光器抗灾变性光学损伤(COD)能力，采用无杂质空位量子阱混杂技术制备了带有无吸收窗口的940 nm GaInP/GaAsP/GaInAs半导体激光器。借助光致发光光谱分析了退火温度和介质膜厚度对GaInP/GaAsP/GaInAs单量子阱混杂的影响；通过电化学电容电压(EC-V)方法检测了经高温退火后激光器外延片的掺杂浓度分布的变化情况。实验发现，在875 ℃快速热退火条件下，带有磁控溅射法制备的200 nm厚的SiO2盖层样品发生蓝移达29.8 nm，而电子束蒸发法制备的200 nm厚TiO2样品在相同退火条件下蓝移量仅为4.3 nm。两种方法分别对蓝移起到很好的促进和抑制作用。将优化后的条件用于带有窗口结构的激光器器件制备，其抗COD能力提高了1.6倍。

提出了一种新的半导体激光器增透膜——AlN膜，并用matlab软件模拟分析了不同腔面反射率对激光器输出功率的影响，得到激光器最大输出功率时前后腔面的反射率的最佳值。采用反应磁控溅射技术，利用高纯铝靶(99.999％)和N2+Ar的混合气体在K9玻璃基片上沉积了AlN薄膜。利用Filmetrics系统对薄膜进行光学性能测试，分析了不同工艺参数对薄膜沉积速率和折射率的影响。将最优条件下制得的AlN单层增透膜用于半导体激光器上，光学灾变损伤阈值和器件输出功率都得到了很大的提高。

介绍了固体受激布里渊散射(SBS)介质的普遍特性及最新研究进展,对SBS相位共轭镜全固化中存在的主要问题进行了探讨。指出在适当的抽运条件下,固体介质的SBS负载能力可以高于材料自身固有的光学损伤阈值,并具备实现高相位共轭保真度的潜力。